A kind of method for modifying the surface of metal cerium
A metal cerium modification technology, applied in the field of metal cerium surface modification, metal cerium surface nitriding and coating treatment to improve its anti-aging and corrosion performance, can solve the problem of affecting metal characteristics and surface appearance quality, easy oxidation corrosion, storage Unsatisfactory effect and other problems, to achieve the effect of increasing the surface aesthetics and enhancing the anti-aging and corrosion performance
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[0029] 1) The metal cerium sample (10mm×10mm×3mm) that has been polished, polished and ultrasonically cleaned is immediately placed on the substrate stage in the vacuum chamber of the dual ion beam sputtering deposition system, and the chamber is closed for vacuuming;
[0030] 2) The background vacuum reaches 8.5×10 -5 After Pa, the auxiliary source is fed with argon gas, the flow rate is 5 sccm, and the working gas pressure is 0.9×10 -2 Pa, the working parameters are auxiliary source ion energy 600eV (electron volts), beam current 35mA, the metal cerium sample is sputtered and cleaned for 15 minutes, and then the auxiliary source is stopped;
[0031] 3) The main source is connected with argon gas, the flow rate is 7sccm, and the working gas pressure is 1.5×10 -2 Pa, the working parameters are argon ion energy 2500eV, beam current 80mA, sputtering and cleaning the pre-polished and polished high-purity metal cerium target, preparing for reactive sputtering, and stopping the ma...
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