High-frequency induction evaporation source device

Abstract

The invention provides a high-frequency induction evaporation source device. The high-frequency induction evaporation source device comprises an inner crucible used for bearing evaporation materials, an induction coil arranged on the periphery of the inner crucible in a sleeving mode, a radio frequency generator connected with the induction coil and a radio frequency induction heating component arranged in the inner crucible. The induction coil is used for receiving alternating current emitted by the radio frequency generator to generate an induced magnetic field. The radio frequency induction heating component comprises an induction kernel body with the electrical conductivity. The induction kernel body generates induced current in the induction magnetic field of the induction coil and generates heat to heat the evaporation materials. Compared with an existing high-frequency induction evaporation source device, the high-frequency induction evaporation source device has the advantages that the heating area of the evaporation materials in the inner crucible can be effectively dispersed, and accordingly, the problems that the local heating rate of evaporation materials is not uniform and evaporation materials close to the wall of the inner crucible are locally overheated and crack are effectively avoided.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a high-frequency induction evaporation source device. Background technique [0002] OLED (Organic Light-Emitting Diode, organic light-emitting diode) display, also known as organic electroluminescence display, is a new flat panel display device, because of its simple preparation process, low cost, low power consumption, high luminous brightness, Wide range of working temperature, light and thin size, fast response speed, easy to realize color display and large-screen display, easy to realize matching with integrated circuit driver, easy to realize flexible display, etc., so it has broad application prospects. At present, the mass-produced OLED manufacturing technology adopts the method of vacuum evaporation to prepare OLED material thin films. [0003] The vacuum evaporation method is to heat the raw material to be formed in the evaporation container in a vacuum chamber, so tha...

AI Technical Summary

Problems solved by technology

[0006] 1. The evaporating material located far away from the wall of the inner crucible 20 is difficult to be fully heated, resulting in uneven local heating rates;

[0007] 2. The evaporating material located near the wall of the inner crucible 20 will be cracked due to overheating

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