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Gas sensor and preparation method thereof

A gas sensor and gas sensitive technology, applied in the direction of electrochemical variables of materials, etc., can solve the problems of unfavorable gas adsorption and detection, lack of stability of gas adsorption, sensitivity and gas selectivity constraints, etc., to ensure stability and improve binding energy. , to avoid the effect of lattice mismatch

Active Publication Date: 2017-06-13
SOUTHEAST UNIV
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Problems solved by technology

However, various studies have shown that black phosphorus lacks stability in gas adsorption and the material properties do not change significantly, so that the sensitivity and gas selectivity of black phosphorus gas sensors are greatly restricted, which is very unfavorable for gas adsorption and detection.

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  • Gas sensor and preparation method thereof
  • Gas sensor and preparation method thereof
  • Gas sensor and preparation method thereof

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Embodiment Construction

[0033] The specific implementation steps of the present invention will be illustrated below in conjunction with the accompanying drawings. It should be understood that these drawings are only used to illustrate the present invention, and are not intended to limit the scope of the present invention.

[0034] The gas sensor of the present invention, such as figure 1 The longitudinal sectional view of the gas sensor structure shown mainly includes the following parts:

[0035] A single crystal silicon substrate 1; a silicon nitride layer 2 deposited on the upper surface of the single crystal silicon substrate 1; a silicon oxide layer 3 deposited on the silicon nitride layer 2; a heating electrode 4 placed on the silicon oxide layer 3; The silicon nitride layer 5 covering the heating electrode 4 as an insulating layer; the connection hole 6 of the heating electrode 4 on the silicon nitride layer 5 ; the gas sensitive film 7 and the gas sensitive electrode 8 placed on the silicon n...

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Abstract

The invention discloses a gas sensor and a preparation method thereof. The gas sensor is provided with a gas sensitive layer; the gas sensitive layer comprises a gas sensitive material film and a gas sensitive electrode; the sensitive material of the gas sensitive material film is a cobalt-doped black phosphorus material and has the thickness like that of 1 to 10 atom layers; the black phosphorus material is prepared from red phosphorus and iodide of tin; the atomic number of the cobalt atoms doped in the black phosphorus accounts for 2 to 10 percent. The invention further discloses the application of the gas sensor to detection of carbon monoxide gas, and the preparation method of the sensor. According to the gas sensor provided by the invention, the combining capability of the gas sensitive material and the carbon monoxide is improved, the absorption of gas molecules is promoted and the stability of the gas sensor is guaranteed; the sensitivity of the gas sensor and the selectivity on the carbon monoxide gas are improved; the gas sensor based on the two-dimensional material black phosphorus can be made to be thin.

Description

technical field [0001] The invention relates to a gas sensor, in particular to a gas sensor based on metal cobalt-doped black phosphorus structure and its preparation method and application. Background technique [0002] Carbon monoxide is a product of incomplete combustion of carbon-containing substances such as oil and coal. With the rapid development of economic transportation in various countries in the world, the consumption of coal and oil has gradually increased, and the emission of carbon monoxide has also increased. It has become an environmental pollution, especially One of the important sources of urban air pollution. At the same time, carbon monoxide is also a common toxic gas in people's lives. This gas is colorless, odorless, non-irritating, and almost insoluble in water. After entering the human body with air, it will enter the blood circulation through the alveoli. Because the affinity with hemoglobin is much greater than that of Oxygen and hemoglobin make h...

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Application Information

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IPC IPC(8): G01N27/30
CPCG01N27/30
Inventor 雷双瑛栾山
Owner SOUTHEAST UNIV
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