A new type of micro-spherical sensor for sensing changes in the space environment and its preparation method
A space environment, sensor technology, applied in instruments, fluid velocity measurement, velocity/acceleration/shock measurement, etc., can solve the problems of large volume, limited use environment conditions, slow response time, etc., to improve the sensitivity and range, realize the layout and measurement, the effect of reducing the overall size
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[0028] The present invention will be further explained below in conjunction with the accompanying drawings.
[0029] The novel micro-spherical sensor for sensing changes in the spatial environment of the present invention includes an outer sphere 1 and a microgroove 2, the microgrooves 2 are evenly distributed on the outer surface of the outer sphere 1 with the center of the outer sphere 1 as the center point, and nitrogen is deposited in the microgroove 2 A silicon nitride thin layer 3, polyimide 4 is deposited on the upper surface of the silicon nitride thin layer 3, an intermediate layer 5 is etched on the polyimide 4, and an upper lining layer 6 is processed on the upper surface of the intermediate layer 5. One end of the micro-beam 8 is fixed vertically to the surface of the microsphere 11 and then located at the center of the micro-groove 2 , and the other end of the micro-beam 8 is fixed to the middle layer 5 . The magnetron sputtering method is used to sputter polyviny...
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