Unlock instant, AI-driven research and patent intelligence for your innovation.

Free-form surface measuring device based on metallic silver enhanced fluorescence and measuring method thereof

A technology for enhancing fluorescence and measuring devices, which is applied in the directions of measuring devices, optical devices, instruments, etc., can solve the problems of large surface height error and uneven fluorescence interlayer, and achieves small surface height errors, reduced measurement costs, cost reduction effect

Inactive Publication Date: 2017-06-30
HARBIN INST OF TECH
View PDF7 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problem of large surface height error due to the inhomogeneity of the fluorescent intermediary layer on the surface of the sample, and to provide a free-form surface measurement device and its measurement method based on metallic silver enhanced fluorescence

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Free-form surface measuring device based on metallic silver enhanced fluorescence and measuring method thereof

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0018] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the free-form surface measurement device based on metallic silver enhanced fluorescence described in this embodiment, the measurement device includes an illumination module, a detection module and a sample module;

[0019] According to the propagation direction of the illumination light, the illumination module is as follows: laser 1, collimator 2, aperture 3, polarization beam splitter prism 4, scanning galvanometer 5 and scanning lens 6;

[0020] According to the signal light propagation direction, the detection module is as follows: scanning lens 6, scanning galvanometer 5, polarization beam splitter prism 4, optical filter 9, collecting lens 10, pinhole 11 and photodetector 12;

[0021] The sample module includes a sample to be tested 7 and a three-dimensional micro-position stage 8 for placing the sample to be tested 7;

[0022] The surface of the sample to be tested 7 i...

specific Embodiment approach 2

[0024] Specific implementation mode two: the following combination figure 1 This embodiment will be described. This embodiment will further describe the first embodiment. The scan lens 6 is used as an illumination and imaging lens, and has a field of view of 50 mm×50 mm.

specific Embodiment approach 3

[0025] Specific implementation mode three: the following combination figure 1 This embodiment will be described. This embodiment will further describe Embodiment 1. The wavelength of the laser beam emitted by the laser 1 is 532nm, and the optical power of the illumination light after passing through the scanning lens 6 is less than 1w.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A free-form surface measuring device based on metallic silver enhanced fluorescence and a measuring method thereof belong to the technical field of optical precision measurement. The invention aims to solve the problem that a non-uniform fluorescent interlayer on the surface of a sample results in large surface shape height error. The measuring method of the free-form surface measuring device based on metallic silver enhanced fluorescence comprises the following steps: the surface of a sample to be measured is coated with a metal fluorescent film; a laser beam emitted by a laser passes through a collimating lens and a diaphragm to form parallel light, the parallel light passes through a polarization beam splitter prism, a scanning galvanometer and a scanning lens to form a focusing spot on the sample to be measured, and the metal fluorescent film is excited to emit fluorescence; the fluorescence is collected by a photoelectric detector through the scanning lens, the scanning galvanometer, the polarization beam splitter prism, a filter, a collection lens and a pinhole; the position of the surface of the sample to be measured is determined according to the vertex position of an axial response curve; and a 3D micro-bit object stage drives the sample to be measured to move in a 3D direction to form three-dimensional scanning image. The device and the method are used to measure the surface shape of a large-aperture free-form surface object.

Description

technical field [0001] The invention relates to a free-form surface measuring device based on metallic silver enhanced fluorescence and a measuring method thereof, belonging to the technical field of optical precision measurement. Background technique [0002] When using a large-aperture free-form surface sample measurement device, a layer of weakly attached nanometer-thick fluorescent medium is deposited on the sample surface by using physical vapor deposition technology to construct an isotropic fluorescent scattering surface, and then collect the light emitted by the film on the sample surface. The axial envelope curve is obtained by fluorescence, and the surface morphology of the sample can be obtained through image processing. [0003] However, when calculating the z-axis height of the scanning point, a confocal axial response peak position shift will be introduced due to the film thickness. In practice, due to the inhomogeneity of the fluorescent intermediary layer on...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30
CPCG01B11/303G01B11/24
Inventor 刘俭刘辰光李亮刘妍谭久彬
Owner HARBIN INST OF TECH