Nano-pore detection system based on nano-tube and preparation method and application thereof
A detection system and nanotube technology, applied in measuring devices, material analysis through electromagnetic means, instruments, etc., can solve the problems of poor mechanical stability of two-dimensional material films, reduced signal-to-noise ratio, low signal-to-noise ratio, etc., and achieve good results Effects of Mechanical Stability, Improved Resolution and Sensitivity
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0044] This embodiment provides a nanopore detection system based on single-walled carbon nanotubes. The specific implementation is as follows:
[0045] Grow nanotubes 14 with a diameter of 1-10nm and a length of 500-1000μm on the surface of the substrate 5 with a silicon dioxide film. The negative photoresist is spin-coated on the substrate 5 with the nanotubes 14, and light is used. The method of engraving is to process a negative photoresist micro-channel structure 6 with a thickness of 20 μm and a width of 7 μm on the selected nanotube 14 with a diameter of 2 nm and a length of 500 μm to form a first cavity 11 and a second cavity Chamber 12 and third chamber 13.
[0046] The first chamber 11 and the second chamber 12, the second chamber 12 and the third chamber 13 are not connected, and the first chamber 11 and the third chamber 13 are only connected by nanotubes 14. The two ends of the nanotube 14 are processed with a focused ion beam to ensure that the two ends of the nanot...
Embodiment 2
[0051] This embodiment provides a nanopore detection system based on boron nitride nanotubes. The specific implementation is as follows:
[0052] Disperse nanotubes 14 with a diameter of 300-500nm and a length of 10-90μm on the surface of the substrate 5, spin-coating positive photoresist on the substrate with nanotubes, and use photolithographic processing to set the selected diameter A positive photoresist micro-channel structure 6 with a thickness of 15 μm and a width of 8 μm is processed on a nanotube 14 of 400 nm and a length of 20 μm to form a first cavity 11, a second cavity 12 and a third cavity 13.
[0053] The first chamber 11 and the second chamber 12, the second chamber 12 and the third chamber 13 are not connected, and the first chamber 11 and the third chamber 13 are only connected by selected nanotubes 14 . The two ends of the nanotube 14 are processed with a focused ion beam to ensure that the two ends of the nanotube 14 are not blocked. A focused ion beam is use...
Embodiment 3
[0058] This embodiment provides a nanopore detection system based on multi-wall carbon nanotubes. The specific implementation is as follows:
[0059] Grow nanotubes with a diameter of 10-90nm and a length of 100-500μm on the surface of the substrate 5, spin-coating a negative photoresist on the substrate 5 with nanotubes, and use a photolithography method to select A negative photoresist micro-channel structure 6 with a thickness of 25 μm and a width of 5 μm is processed on the nanotube 14 to form a first cavity 11, a second cavity 12 and a third cavity 13.
[0060] The first chamber 11 and the second chamber 12, the second chamber 12 and the third chamber 13 are not connected, and the first chamber 11 and the third chamber 13 are only connected by nanotubes 14. The two ends of the nanotube 14 are processed with a focused ion beam to ensure that the two ends of the nanotube 14 are not blocked. A transmission electron microscope is used to process the part of the nanotube 14 expos...
PUM
Property | Measurement | Unit |
---|---|---|
diameter | aaaaa | aaaaa |
length | aaaaa | aaaaa |
height | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com