Thickened composite film based on diamond-like carbon thin film and coating method of thickened composite film

Abstract

The invention discloses a thickened composite film based on a diamond-like carbon thin film and a coating method of the thickened composite film. The thickened composite film based on the diamond-like carbon thin film comprises a transition layer and a diamond-like carbon layer which are successively formed from the surface of a substrate to the outside, wherein the transition layer at least comprises a metal base layer and a codeposition layer; and the codeposition layer comprises is fusion of metal carbide and metals corresponding to metal elements in the metal carbide. By the codeposition layer, the nano hardness range can be expanded effectively, and then the thickness of the diamond-like carbon layer can be increased; moreover, huge stress caused by the thick diamond-like carbon layer can be buffered effectively, and the binding force of the composite film and the substrate is increased; and meanwhile, a surface microstructure of the codeposition layer is good, the roughness of DLC cannot be damaged, and therefore, the composite film has low friction coefficient.

Description

technical field [0001] The invention relates to a composite thin film and a coating method thereof, in particular to a thickened composite thin film based on a diamond-like carbon film and a coating method thereof. Background technique [0002] The diamond-like carbon film is a metastable amorphous carbon film containing a large number of sp3 bonds. The carbon atoms are mainly bonded by sp3 and sp2 hybrid bonds. The performance is close to that of diamond. Diamond-like carbon has almost the same characteristics as diamond. Due to its high Hardness and high elastic modulus, low friction coefficient, wear resistance and good vacuum tribological properties, it is very suitable as a wear-resistant coating, so the diamond-like carbon film obtained by vapor deposition process is used in many wear-resistant and hardness requirements parts are widely used. [0003] However, no matter what kind of parts it is used on, generally speaking, under the premise of meeting the size require...

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Problems solved by technology

[0003] However, no matter what kind of parts it is used on, generally speaking, under the premise of meeting the size requirements of the parts, the thickness of the coating, especially the thickness of the diamond-like film, is often as thick as possible, so that the wear resistance of the parts However, once the thickness of the coating increases, especially the thickness of the diamond-like carbon film, the internal stress of the diamond-like carbon layer will increase, which will affect the bonding force between the coating and the substrate, and cause the coating to bond with the substrate. Peeling, which affects the service life and efficiency of the coating, so the reconciliation of this contradiction becomes an urgent problem to be solved

[0004] At the same time, as the thickness of the coating and the diamond-like carbon film increase, the number of defects on the coating surface will increase, the roughness of the coating surface will increase, and the friction coefficient will also increase.

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