A technology for improving the service life of etching solution

Abstract

The invention discloses a technology for prolonging the service life of etching liquor. The technology comprises the following steps: 1) adding 2%-15% of neutral salt into the etching liquor with low liquor activity, and meanwhile, adding 1.3%-4% of an oxethyl compound, wherein the reaction formula of SiF62-anion in the etching liquor and magnetic cation hydrolyzed in the neutral salt is as shown in the specification and the reaction formula of H<+> cation in the etching liquor and anion hydrolyzed in the neutral salt is as shown in the specification; 2) cavitating the uniformly stirred mixed solution in a magnetic field with strength of 20-40kHz, and then filtering out sediment (X2)(SiF6)n in the cavitated solution and making the solution with the sediment(X2)(SiF6)n filtered out pass through ion exchange resin, thereby acquiring filtrate; 3) adding deionized water into the filtrate acquired in the step 2) and keeping the pH value from 1.8 to 2.3. According to the technology, the service life of the etching liquor can be prolonged, the liquor activity can be guaranteed, the replacing period of the etching liquor can be prolonged and the isolating rate trend in the prolonging period of the service life thereof is stable.

Description

technical field [0001] The invention relates to the technical field of etching, in particular to a process for improving the service life of etching liquid. Background technique [0002] The etching process is hydrofluoric acid on the main component of glass SiO 2 The reaction produces fluorosilicic acid H 2 SiF 6 , specifically: SiO 2 +4HF→SiF 4 +2H 2 O; 3SiF 4 +3H 2 O→H 2 SiO 3 +2H 2 SiF 6 . At the end of the life of the etching solution, the activity of the etching solution is low, not as good as before, and the by-product fluosilicic acid is increasing, which has a certain impact on the edge-cutting effect. [0003] Through the same process conditions of the two etching workshops A and B, the electrical properties of the products etched with 8 million pieces and 18 million pieces were scientifically recorded. The specific data are as follows; [0004] Number of pieces produced Eta Uoc Isc FF Rs. Rsh IRev2 Etching workshop A 18...

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Problems solved by technology

[0006] From the data in the table, it can be seen that the etching workshop A produces 18 million pieces, the life of the etching solution is at the end, the property of the etching solution deteriorates, the etching efficiency is reduced, and the open circuit voltage is reduced, resulting in a decrease in the short-circuit current, a increase in the series resistance, and a parallel connection. The decrease in resistance leads to a decrease in fill factor, etc., and the increase in dark current directly affects the electrical properties of its products.

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