Direct-drive radio-frequency power supply

Abstract

The invention relates to a direct-drive radio-frequency power supply comprising a signal source, a voltage conditioning circuit and three parallel high-voltage amplifier circuits. The signal source, the voltage conditioning circuit and the three parallel high-voltage amplifier circuits are connected successively. The signal source provides two paths of independent low-voltage sine wave signals RF and AC that have the voltages within a 5-V range and have adjustable amplitudes, frequencies, and phases. The voltage conditioning circuit receives the RF and AC signals, processes the RF and AC signals to obtain an RF- 'signal, an RF+AC+ coupled signal and an RF+AC-coupled signal, outputs the obtained signals to the three parallel high-voltage amplifier circuits for processing to obtain three paths of dual-side differential high-voltage signals having the output voltages adjusted within a 1000-V range and frequencies adjusted within a 900-KHz range, wherein the obtained signals can be provided for a load. The high-voltage amplifier circuits established by discrete components consist of differential correction circuits, drive boost circuits, power amplifier circuits, and feedback circuits connected between the input terminals of the differential correction circuits and the output terminals of the power amplifier circuits. The direct-drive radio-frequency power supply has advantages of low cost, high output voltage, adjustable frequency, and wide frequency band.

Description

technical field [0001] The invention relates to a radio frequency power supply, in particular to a high frequency and high voltage direct drive radio frequency power supply. Background technique [0002] As an important component of the mass spectrometer, the RF power supply is loaded on the rectangular ion trap, quadrupole, multistage rod or ion funnel to control the movement of ions in the rectangular ion trap, quadrupole, multistage rod or ion funnel . The output voltage and operating frequency of the RF power supply affect the range of substances that the mass spectrometer can detect, and its stability and linearity affect the accuracy and stability of the mass spectrometer. Existing RF power supplies for mass spectrometers mainly use coil resonance to achieve thousands of volts of high-voltage output. The circuit can only work at the resonance frequency point, resulting in the inability to change the frequency parameters, which greatly limits the flexibility of the app...

AI Technical Summary

Problems solved by technology

[0004] The main purpose of the present invention is to establish a non-coil resonant direct-drive RF power supply with low cost and high output voltage through discrete components, so as to solve the problems of high cost and low output voltage in the above-mentioned existing direct-drive RF power supply

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