Nitridation controllable zero-pollution ion nitriding device

Abstract

The invention relates to an ion nitriding device, in particular to a nitridation controllable zero-pollution ion nitriding device which comprises a furnace body, a furnace base plate, a transmission system, an adjustable cathode system, a fast cooling system, an adjustable anode system and a zero-pollution gas circulating system. The furnace body is arranged over the furnace base plate to form a nitridation chamber. The transmission system is fixed to the middle portion of the furnace base plate. The adjustable cathode system, the fast cooling system and the adjustable anode system are arranged in the middle of the nitridation chamber. The zero-pollution gas circulating system is arranged on the lower portion outside the furnace base plate. The nitridation controllable zero-pollution ion nitriding device solves the technical problems that temperature of a traditional ion nitriding device is increased or decreased slowly, the space between the cathode and the anode is not adjustable, nitridation is uncontrollable, and ammonia gas pollution is caused. The device is also suitable for physical vapor deposition and chemical vapor deposition of the surface of a material.

Description

technical field [0001] The invention relates to an ion nitriding device, in particular to a zero-pollution ion nitriding device with controllable nitriding, and belongs to the technical field of chemical heat treatment. Background technique [0002] Ion nitriding is a chemical heat treatment method to strengthen the surface, and it is also a surface modification technology that uses the glow discharge of nitrogen-containing gas to form active nitrogen ions, which penetrate into the surface of the workpiece under the action of an electric field. The nitrided layer produced by it has high hardness, high wear resistance and good corrosion resistance, so it is suitable for surface strengthening of stainless steel, carbon steel, alloy steel and titanium alloy and other metals. However, the structure of the traditional ion nitriding device is unreasonable, the heating and cooling speed is slow and uncontrollable; the distance between the cathode and the anode cannot be adjusted, r...

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Problems solved by technology

[0006] The object of the present invention is to provide a zero-pollution ion nitriding device with controllable nitriding. Nitrogen is controllable, and it can also realize zero-pollution ion nitriding, so as to solve the technical problems of slow heating and cooling, non-adjustable distance between cathode and anode, uncontrollable nitriding and ammonia pollution in traditional ion nitriding devices

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