Manufacturing method of controllable-temperature microfluidic chip

Abstract

The invention discloses a manufacturing method of a controllable-temperature microfluidic chip. The method is characterized by comprising the following steps: printing a thermoelectric semiconductor temperature control circuit on the upper plane of the microfluidic chip, wherein the chip comprises at least one reaction groove area and at least one temperature control circuit area; processing a reaction groove one surface of the reaction groove area, and printing a temperature sensing probe on the rear surface of the other surface of the reaction groove; correspondingly printing circuit layers which are correspondingly manufactured through an N type thermoelectric material and a P type thermoelectric material on two surfaces of the chip at the temperature control circuit area; forming an N-P-N-P...alternative series-connection circuit structure through copper plating through holes; and connecting a power supply to refrigerate and heat the reaction groove area. The method has the advantages that the temperature of the groove reactor area of the microfluidic chip can be accurately controlled; the temperature control accuracy is high; the temperature is rapidly increased; and the method is applicable to high-flux biological detection and multi-temperature-section complex micro-reaction process study.

Description

technical field [0001] The invention relates to a method for manufacturing a temperature-controllable microfluidic chip, which belongs to the field of electronic devices and micro-nano processing. Background technique [0002] A microfluidic chip refers to a chemical or biological laboratory built on a centimeter-square chip. The basic operations can be integrated on a very small chip, and the microchannels form a network to control the fluid passing through the system, so as to realize chemical synthesis, biological detection and other functions. The main feature of a microfluidic chip is that the effective structures (channels, reaction chambers, etc.) containing fluids are microscale or nanoscale in at least one dimension. In the process of chemical reaction or biological detection, it is usually necessary to precisely control the temperature of the reaction process. For example, in the process of gene sequencing PCR detection, it is necessary to cycle the heat preservat...

AI Technical Summary

Problems solved by technology

At present, microfluidic chips that require low-temperature operation usually use commercial semiconductor cooling chips to be placed under the chip for cooling operations. Due to the limitations of the semiconductor cooling chip packaging ceramics and the heat transfer capacity of the microfluidic chip material itself, the temperature control effect is especially high. There is still a big bottleneck in the ability of rapid heating and cooling during the flux detection process

The patent (CN105914189A) discloses a microfluidic chip cooling device, which uses a combination of a semiconductor cooling chip and a cavity filled with a liquid metal heat-conducting medium to improve cooling efficiency, but the structure of the device is complex, and it also violates the principle of all-solid-state cooling of thermoelectric semiconductor materials. The original intention of the design increases the difficulty of maintenance again

[0004] In addition, due to the multi-unit operation of chemical or biological processes on tiny chips, different units often have different temperature requirements. The simple superposition of existing semiconductor chips and microfluidic chips cannot achieve precise temperature control for each area.

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