Cascade microsphere resonant cavity type humidity sensor

Abstract

The invention discloses a cascade microsphere resonant cavity type humidity sensor. The sensor comprises a sensor base, wherein a transverse mounting groove a and a longitudinal mounting groove b which are perpendicular to each other are formed in the sensor base; a fused optic fiber is arranged in the transverse mounting groove a through a fused optic fiber leftward adjusting screw and a fused optic fiber rightward adjusting screw; a left optic fiber wire jumper protection sleeve and a right optic fiber wire jumper protection sleeve are respectively arranged at the left and right ends of the fused optic fiber; a single-mode optic fiber is arranged in the longitudinal mounting groove b through a single-mode optic fiber adjusting screw; and the single-mode optic fiber is arranged relative to the a tapered zone of the fused optic fiber. The sensor is wide in humidity response range and high in sensitivity coefficient, and compared with the traditional humidity sensor, the sensor has the advantages of small size, wide response range, high sensitivity and high stability, and can be applied to the fields of aerospace, meteorology, clinical medicine and civil engineering.

Description

technical field [0001] The invention belongs to the technical field of optical fiber sensors, and in particular relates to a cascaded microsphere resonant cavity type humidity sensor. Background technique [0002] Humidity is an important physical quantity. Accurate measurement of humidity is required in many fields such as aerospace, meteorology, agriculture, food industry, clinical medicine, manufacturing, and civil engineering. There are three main types of traditional humidity sensors: electrolyte humidity sensors, semiconductor ceramic humidity sensors and organic polymer humidity sensors. [0003] Compared with the traditional humidity sensor, the optical fiber humidity sensor has been widely used in various occasions due to its small size, light weight, strong anti-electromagnetic interference ability, corrosion resistance, simple production, high precision, easy integration and high resolution. Humidity measurement in progress. Since the emergence of optical fiber ...

AI Technical Summary

Problems solved by technology

[0006] The above-mentioned optical fiber light transmission type and optical fiber sensing humidity sensors are usually based on changes in the external refractive index to achieve sensing. In addition to humidity, changes in temperature and gas concentration will also cause changes in the refractive index, thereby introducing cross-sensitivity

Moreover, common optical fiber humidity sensors are usually combined with moisture-sensitive polymer materials to improve the sensitivity of humidity detection. The polymer will age when exposed to the air for a long time, which will affect the sensing performance and greatly reduce the stability and service life of the sensor.

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