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Porous silicon carbide ceramic as well as preparation method and application thereof

A porous silicon carbide and silicon carbide technology, applied in the field of ceramic materials, can solve problems affecting wafer quality, wafer deformation, and reducing porosity

Active Publication Date: 2017-11-07
SHENZHEN SUNTECH ADVANCED CERAMICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, porous silicon carbide ceramics usually need to be sintered at a higher temperature. During the sintering process, more liquid phases will be formed inside the porous silicon carbide ceramics, which will not only fill the pores and reduce the porosity, but also the liquid phase will be cooled after cooling. The formed glass phase will also increase the thermal expansion coefficient of porous silicon carbide ceramics, making porous silicon carbide ceramics vulnerable to ambient temperature changes during wafer processing, resulting in changes in the planarity of porous silicon carbide ceramics, resulting in processed Wafers are deformed, affecting the quality of the wafers

Method used

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  • Porous silicon carbide ceramic as well as preparation method and application thereof
  • Porous silicon carbide ceramic as well as preparation method and application thereof
  • Porous silicon carbide ceramic as well as preparation method and application thereof

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preparation example Construction

[0023] Such as figure 1 As shown, a method for preparing porous silicon carbide ceramics in an embodiment includes the following steps:

[0024] Step S110: Weigh the raw materials.

[0025] Among them, in terms of mass percentage, the raw materials include the following components: 80%-95% silicon carbide, 2%-15% sintering aid and 1%-15% additives.

[0026] Among them, the median diameter of silicon carbide D 50 It is 10 microns to 75 microns. Generally speaking, pores are not conducive to reducing the thermal expansion coefficient of ceramics, but proper pores can accommodate the thermal expansion of porous ceramics due to temperature changes, thereby reducing the thermal expansion coefficient of porous ceramics, but too many pores will increase the thermal expansion coefficient of porous ceramics. The reason for choosing silicon carbide with this particle size is to control the porosity of silicon carbide and ensure that it has a low thermal expansion coefficient.

[0027] Among t...

Embodiment 1

[0053] The preparation process of the porous silicon carbide ceramic of this embodiment is as follows:

[0054] (1) Weigh the raw materials. The raw materials are composed of 90% silicon carbide, 5% sintering aid and 5% additives according to the mass percentage. Among them, the median diameter of silicon carbide is D 50 It is 10 microns to 40 microns, the additive is aluminum titanate, and the median particle size of the additive is D 50 The sintering aid is composed of alumina and silica, and the mass ratio of alumina to silica is 3:2.

[0055] (2) Stir and mix the dispersant, binder and deionized water in a magnetic stirrer at a speed of 120 revolutions per minute for 1.5 hours to form a premixed solution; put the raw materials and premixed solution into a ball mill tank at 65 revolutions per minute Ball mill and mix for 27 hours at a speed of 1000 rpm to obtain a slurry. Among them, when the ball mill is mixed, the mass ratio of the raw material to the grinding medium is 1:1.8;...

Embodiment 2

[0061] The preparation process of the porous silicon carbide ceramic of this embodiment is as follows:

[0062] (1) Weigh the raw materials. The raw materials are composed of 80% silicon carbide, 15% sintering aid and 5% additives according to the mass percentage. Among them, the median diameter of silicon carbide is D 50 It is 30 microns to 75 microns, the additive is spodumene, the median particle size of the additive is D 50 The sintering aid is composed of alumina and silica, and the mass ratio of alumina to silica is 5:2.

[0063] (2) Stir and mix the dispersant, binder and deionized water in a magnetic stirrer at a speed of 100 revolutions per minute for 1 hour to form a premixed liquid; put the raw materials and premixed liquid into a ball mill tank at 50 revolutions per minute Ball mill and mix for 30 hours at a speed as high as 100 to obtain a slurry. Among them, when the ball mill is mixed, the mass ratio of the raw material to the milling medium is 1:1.5; the mass ratio ...

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Abstract

The invention relates to porous silicon carbide ceramic as well as a preparation method and application thereof. The preparation method of the porous silicon carbide ceramic comprises the following steps: weighing raw materials containing the following components in percentage by weight: 80%-95% of silicon carbide, 2%-15% of a sintering aid and 1%-15% of an additive, wherein the additive is selected from at least one of aluminum titanate, spodumene and eucryptite; mixing the raw materials to form a mixture; and shaping the mixture into a green body, and sintering the green body at 130-1550 DEG C, so as to obtain the porous silicon carbide ceramic. The porous silicon carbide ceramic prepared by virtue of the preparation method has relatively high porosity and relatively low thermal expansion coefficient.

Description

Technical field [0001] The invention relates to the field of ceramic materials, in particular to a porous silicon carbide ceramic and a preparation method and application thereof. Background technique [0002] The porous ceramic vacuum chuck is a working platform on wafer manufacturing equipment such as wafer thinner, wafer dicing machine, wafer cleaning machine, etc. It fixes the wafer by vacuum to process, inspect or inspect the wafer. Clean. Because porous silicon carbide ceramic has the characteristics of good chemical stability, acid and alkali corrosion resistance, high temperature resistance, wear resistance, and high hardness, it is widely used as a vacuum adsorption platform on wafer manufacturing equipment. [0003] At present, porous silicon carbide ceramics usually need to be sintered at a higher temperature. During the sintering process, more liquid phases are formed inside the porous silicon carbide ceramics, which not only fill the pores and reduce the porosity, but...

Claims

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Application Information

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IPC IPC(8): C04B35/565C04B35/622C04B35/64C04B38/00
CPCC04B35/565C04B35/622C04B35/64C04B38/0041C04B2235/3201C04B2235/3203C04B2235/3206C04B2235/3217C04B2235/3234C04B2235/3418C04B2235/3472C04B2235/5436C04B2235/6562C04B2235/6567C04B2235/96C04B2235/9607C04B38/0074
Inventor 黎海华向其军谭毅成
Owner SHENZHEN SUNTECH ADVANCED CERAMICS