Heating device based on electromagnetic induction

Abstract

The invention provides a heating device based on electromagnetic induction. A magnetizer is placed on the periphery of a tray, and the vast majority of magnetic lines are concentrated nearby the tray, so that heating temperature is higher, and the heating speed is higher. Since the magnetic lines are evenly distributed in the tray, temperature uniformity is better. The magnetizer can be used for gathering the magnetic lines, guide the direction of the magnetic lines and reduce magnetic resistance, and heat radiated by the tray to the lower portion of a reaction cavity is reflected back to the tray through the tray, so that the energy utilization efficiency is improved. The majority of magnetic lines are concentrated around the tray, the distribution space range of the magnetic lines is reduced, and therefore electromagnetic influences on other units in the device and device external environment are reduced.

Description

technical field [0001] The invention relates to a heating device, in particular to a heating device based on electromagnetic induction. Background technique [0002] In the field of thin film material growth and preparation, metal organic chemical vapor deposition (MOCVD) equipment is one of the key equipment for the epitaxial growth of compound semiconductor thin film materials, especially suitable for large-scale production in the semiconductor industry. The most important equipment for compound semiconductors such as indium, gallium arsenide, and zinc oxide. [0003] During the growth process of thin film materials, various chemical reactions occur on the substrate under high temperature conditions to form thin film materials. The substrate sheet is placed on the tray carrying the substrate sheet. By heating the tray to raise the temperature, the heat is transferred to the substrate sheet in the form of heat conduction to realize the heating of the substrate sheet. Ther...

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Problems solved by technology

[0004] Thermal radiation heating has the advantages of simple design and good temperature uniformity, but it also has disadvantages such as low energy utilization efficiency, slow temperature rise, and low temperature.

Induction heating overcomes the above shortcomings, with fast temperature rise and high energy utilization efficiency, but it is difficult to control the temperature uniformity. At the same time, due to the alternating magnetic field generated in the space, eddy currents will also be induced in parts that do not need to be heated, and the magnetic field will also May cause electromagnetic interference to other electrical equipment

However, the growth of thin film materials requires high heating temperature and temperature uniformity of the heating device. It is difficult for existing heating equipment to meet the requirements of high heating temperature and uniform heating temperature at the same time.

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