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Manufacturing method for gold nanometer array

A production method, gold nanotechnology, applied in the field of nanomaterials, can solve problems such as limited graphic area, low efficiency, and difficulty in realizing nanostructure arrays, and achieve high structural order, easy operation, and high specific surface area. Effect

Inactive Publication Date: 2018-01-05
韦献艺
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Both electron beam lithography and self-assembly methods have certain limitations. Electron beam lithography has a limited area of ​​graphics and low efficiency, and it is difficult to realize the array of nanostructures only by self-assembly technology.

Method used

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Examples

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Embodiment

[0017] A method for making a gold nanoarray, comprising the steps of:

[0018] 2) The design of the positioning template, through the design of the template, determine the size and quantity of the micro-area, each micro-area must be an independent area;

[0019] 2) According to the number and size of the designed templates in step 1), use a laser direct writing machine to make a template mask, and then select a glass sheet as the substrate material, and deposit the cleaned glass sheet through high vacuum resistance evaporation on it. Deposit a chrome layer with a thickness of 250-300 nm on the surface; make the designed pattern on the glass substrate by photolithography, and edit the number;

[0020] 3) Put the prepared positioning template in step 2) into the washing solution made of concentrated sulfuric acid and hydrogen peroxide. The ratio of concentrated sulfuric acid and hydrogen peroxide is 3:1, heat to 80°C, and soak for 60 minutes;

[0021] 4) Rinse the positioning t...

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Abstract

The invention provides a method for making a gold nanoarray, which is easy to operate, realizes the array of local surface plasmon structures, and can also fill different units with nanosphere structures of different sizes, which is a simple and effective method. Nano-metal structure processing means, the gold nano-array structure produced by this method has the characteristics of low defect, high specific surface area and structural order. Sensitive biosensing provides an effective means.

Description

technical field [0001] The invention belongs to the field of nanometer materials, in particular to a method for manufacturing a gold nanometer array. Background technique [0002] In recent years, with the development of microfabrication technology and nano-materials, more and more attention has been paid to the electromagnetic properties of nano-metal structures. The interaction between light and nano-metal structures has produced a series of new physical phenomena. When the electromagnetic wave is incident on the surface of the nano-metal array structure, the local surface plasmon generated can greatly enhance and concentrate the electromagnetic energy. Based on these characteristics, the nano-metal structure is used in biosensing, chemical sensing, optical design and magnetic It has broad application prospects in data storage and other fields. [0003] Biosensors based on this principle have faster detection speed and sensitivity than traditional biosensors in the labeli...

Claims

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Application Information

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IPC IPC(8): B82B1/00B82B3/00B82Y30/00B82Y40/00
Inventor 韦献艺
Owner 韦献艺
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