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A kind of transfer method of ultra-thin anodized aluminum film

An anodized aluminum oxide transfer method technology, which is applied in the transfer field of ultra-thin anodized aluminum oxide film, can solve the problems of detachment from the substrate, low success rate, and long time-consuming AAO, and achieve high-efficiency transfer, high success rate, and time-consuming transfer short effect

Active Publication Date: 2019-05-17
SHENZHEN TOPMEMBRANES INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, when PMMA is removed and AAO is attached to the surface of the substrate, there are mainly the following problems: if the AAO is placed on the substrate, and then the substrate is submerged in the PMMA removal solution, with the dissolution of PMMA, the AAO will Move by natural convection, thereby breaking away from the substrate
Moreover, this method of dissolving PMMA first and then scooping up AAO with the substrate is not suitable for ultra-thin AAO films with a size of more than 15×15mm, and it takes a long time to transfer AAO, and the success rate is very low

Method used

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  • A kind of transfer method of ultra-thin anodized aluminum film

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Experimental program
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Effect test

Embodiment 1

[0025] A method for transferring an ultra-thin anodized aluminum oxide film, comprising the following steps: S1, getting an anodized aluminum oxide ultra-thin film with a polymethyl methacrylate support layer that is a PMMA / AAO composite film is placed on a target substrate, wherein the anode The thickness of aluminum oxide ultra-thin film is 50nm, and target substrate is a silicon chip, and PMMA / AAO composite film is fixed on the target substrate surface with clamp; S2, then a part of the target substrate with composite film is immersed in the support layer removal solution for 2min, The part of the composite film immersed in the support layer removal solution accounts for 50% of the total area of ​​the composite film, and is taken out; S3, after the support layer removal solution is evaporated, another part of the target substrate with the composite film is immersed in the support layer removal solution for 2 minutes, and taken out ; S4. After the support layer removal soluti...

Embodiment 2

[0027] A method for transferring an ultra-thin anodized aluminum oxide film, comprising the following steps: S1, getting an anodized aluminum oxide ultra-thin film with a polymethyl methacrylate support layer that is a PMMA / AAO composite film is placed on a target substrate, wherein the anode The thickness of the aluminum oxide ultra-thin film is 5000nm, and the target substrate is a quartz plate, and the PMMA / AAO composite film is fixed on the target substrate surface with a clamp; S2, subsequently immersing a part of the target substrate with the composite film in the support layer removal solution for 60min, The part of the composite film immersed in the support layer removal solution accounts for 90% of the total area of ​​the composite film, and is taken out; S3, after the support layer removal solution is evaporated, another part of the target substrate with the composite film is immersed in the support layer removal solution for 60 minutes, and taken out ; S4. After the ...

Embodiment 3

[0029]A method for transferring an ultra-thin anodized aluminum oxide film, comprising the following steps: S1, getting an anodized aluminum oxide ultra-thin film with a polymethyl methacrylate support layer that is a PMMA / AAO composite film is placed on a target substrate, wherein the anode The thickness of the aluminum oxide ultra-thin film is 2500nm, and the target substrate is a sapphire sheet. The PMMA / AAO composite film is a large-area ultra-thin anodized aluminum oxide porous film prepared by the method in ZL2015108938946. The PMMA / AAO composite film is fixed on the target substrate with a clamp Surface; S2, then immerse a part of the target substrate with the composite film in the support layer removal solution for 30min, the part of the composite film immersed in the support layer removal solution accounts for 70% of the total area of ​​the composite film, and take it out; S3, the support layer removal solution volatilizes After drying, immerse another part of the targ...

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Abstract

The invention discloses a transfer method of an ultrathin anode aluminum oxide film. The method comprises the following steps of S1, taking the ultrathin anode aluminum oxide film with a polymethyl methacrylate supporting layer, namely, a PMMA / AAO composite film by using a clamp and placing the PMMA / AAO composite film on a target substrate; S2, then, immersing a part of the target substrate with the composite film into a supporting layer removal liquid for a period of time and taking out the target substrate; S3, after the supporting layer removal liquid is volatilized, immersing the other part of the target substrate with the composite film into the supporting layer removal liquid for a period of time and taking out the target substrate; S4, after the supporting layer removal liquid is volatilized, immersing the whole target substrate with the composite film into the supporting layer removal liquid and then taking out the target substrate, repeating the step S4 for 1-3 times, taking out the substrate and airing the substrate so as to obtain the target substrate with the ultrathin anode aluminum oxide film attached on the surface of the target substrate. According to the transfer method of the ultrathin anode aluminum oxide film, the ultrathin AAO film can be easily and efficiently transferred to a designated position of the target substrate.

Description

technical field [0001] The invention relates to a method for transferring an ultra-thin anodic aluminum oxide film, and specifically belongs to the technical field of anodic aluminum oxide film. Background technique [0002] The pores of the ultra-thin anodic aluminum oxide (AAO) template are double-pass structures, and the barrier layer has been removed. Their thickness is only tens to hundreds of nanometers, and they are widely used in nano-dot arrays, nano-wire arrays, etc. Preparation and substrate surface patterning treatment. The ultra-thin AAO template has a uniform pore size, and the short-range arrangement of the pores is orderly. The material of alumina makes it transparent in the visible light band and electrically insulating. Compared with other patterned nanostructure preparation methods (such as photolithography, electron beam exposure, and focused ion etching), the unique advantage of ultra-thin AAO templates is that they can easily obtain microstructures in ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D11/04
Inventor 郭秋泉赵呈春杨军周学昌
Owner SHENZHEN TOPMEMBRANES INC
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