A preparation method of gallium nitride epitaxial structure based on molybdenum disulfide-graphene composite buffer layer
A graphene composite, molybdenum disulfide technology, applied in the field of optoelectronics, can solve problems such as difficulty in effectively alleviating substrate lattice mismatch, poor quality of nitride materials, inability to grow aluminum nitride layers, etc., and achieve good and high-precision thin films Effects of growth quality, stress reduction, good thickness controllability
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Embodiment 1
[0037] A method for preparing a gallium nitride epitaxial structure based on a molybdenum disulfide-graphene composite buffer layer, comprising the following method steps:
[0038] A, cleaning the silicon substrate;
[0039] B, growing a molybdenum disulfide-graphene composite layer on a silicon substrate;
[0040] C, utilize atomic layer deposition to grow a layer of aluminum nitride layer on the molybdenum disulfide-graphene composite layer;
[0041] D. A gallium nitride layer is grown on the aluminum nitride layer by metal-organic chemical vapor deposition.
Embodiment 2
[0043] A method for preparing a gallium nitride epitaxial structure based on a molybdenum disulfide-graphene composite buffer layer, comprising the following method steps:
[0044] A, cleaning the silicon substrate;
[0045] B, growing a molybdenum disulfide-graphene composite layer on a silicon substrate;
[0046] C, utilize atomic layer deposition to grow a layer of aluminum nitride layer on the molybdenum disulfide-graphene composite layer;
[0047] D. A gallium nitride layer is grown on the aluminum nitride layer by metal-organic chemical vapor deposition.
[0048] In step A, specifically:
[0049] The silicon substrate was washed three times successively with ethanol and deionized water, washed with dilute hydrofluoric acid for 5 minutes, rinsed with deionized water, and dried with nitrogen gas to obtain a silicon substrate.
Embodiment 3
[0051] A method for preparing a gallium nitride epitaxial structure based on a molybdenum disulfide-graphene composite buffer layer, comprising the following method steps:
[0052] A, cleaning the silicon substrate;
[0053] B, growing a molybdenum disulfide-graphene composite layer on a silicon substrate;
[0054] C, utilize atomic layer deposition to grow a layer of aluminum nitride layer on the molybdenum disulfide-graphene composite layer;
[0055] D. A gallium nitride layer is grown on the aluminum nitride layer by metal-organic chemical vapor deposition.
[0056] In step A, specifically:
[0057] The silicon substrate was washed three times successively with ethanol and deionized water, washed with dilute hydrofluoric acid for 10 minutes, rinsed with deionized water, and dried with nitrogen gas to obtain a silicon substrate.
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