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Negative photoresist, suspension and preparation method of the suspension

A technology of negative photoresist and preparation method, which is applied in the field of photoresist, can solve the problems of increasing the overall material cost, accelerating the dispersion of glass powder, and being unfavorable for market promotion, so as to meet production management requirements, speed up grinding efficiency, and improve The effect of stability

Active Publication Date: 2020-12-29
SUZHOU RUIHONG ELECTRONIC CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the additives used have no hydrophilic groups and no coupling effect, so they cannot accelerate the dispersion of glass powder in the initial mixing stage; and the amount of additives is large, which increases the overall material cost and is not conducive to market promotion.

Method used

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  • Negative photoresist, suspension and preparation method of the suspension
  • Negative photoresist, suspension and preparation method of the suspension
  • Negative photoresist, suspension and preparation method of the suspension

Examples

Experimental program
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Effect test

Embodiment 1

[0057] The suspension corresponding to Example 1 will cause the glass powder concentration of the upper liquid part to continuously decrease due to the glass powder sedimentation phenomenon, and the coating film thickness will continue to decrease with the prolongation of the standing retention time; the silane coupling agent can delay this. process, with the increase of the added amount of the silane coupling agent, the retention time of the corresponding suspension is significantly extended; under the condition that the film thickness change is less than 10%, when the added amount of the silane coupling agent reaches 2000ppm, The extended time has since exceeded 24 hours.

[0058] In summary, the negative photoresist and suspension of the present invention are suitable for silicon chip corrosion in the GPP diode manufacturing process. Compared with the prior art, the silane coupling agent has both lipophilic groups and hydrophilic groups. group, which can react with the cycl...

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Abstract

The invention provides negative photoresist, a suspension liquid and a preparation method of the suspension liquid. The negative photoresist comprises cyclized polyisoprene, a solvent and a photosensitizer, the suspension liquid comprises the negative photoresist and glass powder, the negative photoresist or the suspension liquid also comprises a silane coupling agent, the silane coupling agent isdirectly added into the negative photoresist or is added for use during the preparation process of the suspension liquid, and the silane coupling agent is one or more of Gamma-aminopropyl triethoxysilane, Gamma-(2,3-epoxy propyl) propyltrimethoxysilane, Gamma-(methyl propyl trimethoxy) propyltrimethoxysilane. The negative photoresist and the suspension liquid are suitably used for corroding a silicon wafer in a GPP diode manufacturing process; the silane coupling agent simultaneously reacts with the cyclized polyisoprene and the glass powder in the negative photoresist, thus, the grinding dispersion efficiency of the glass powder is improved, the sedimentation time of the glass powder is prolonged, the stability of the suspension liquid is improved, the production management requirement is satisfied, and the cost is reduced.

Description

technical field [0001] The invention relates to the technical field of photoresist, in particular to a negative photoresist, a suspension and a preparation method of the suspension. Background technique [0002] Passivation materials for diodes need to have good electrical properties and chemical stability, and also need to meet the requirements of operability and economy. Glass as a passivation and sealing material in the electronics industry began in the 1960s and 1970s. American G.E Company first developed A-4I1 and A-5 glass passivation diodes. The feature of this product is that after the tube core is welded and pickled, a clean PN junction surface is obtained, and then the glass is directly coated on the PN junction surface, and melted and thermoformed according to the temperature curve to form a stable and dense passivation and sealing layer , The product has good electrical performance and high reliability. Through continuous exploration and improvement, the glass ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/004G03F7/038
CPCG03F7/004G03F7/038
Inventor 马骥黄巍
Owner SUZHOU RUIHONG ELECTRONIC CHEM CO LTD
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