A kind of reduction furnace chassis and its coating preparation method

Abstract

The invention discloses a reduction furnace chassis and a preparation method of a coating thereof. The reduction furnace chassis is made of stainless steel, and a silver coating is arranged on the surface of the chassis, so that a low temperature can be maintained on the surface of the chassis, a black film layer formed by amorphous silica on the chassis surface is further eliminated, and the amorphous silica is enriched on the surface of the chassis in a granule form; a silver / alumina composite film layer is sprayed on an insulated surface of a chassis electrode clamping groove and the surface of the chassis, the adhesive strength between alumina and a matrix is high due to the composite film layer, and strain break is difficultly caused; external insulation protection becomes internal insulation protection, so that the insulation property between the chassis and the electrode is greatly improved; the silver / alumina composite film layer is arranged on the surface of a screen, and thecomposite coating has the advantages of corrosion resistance, high thermal stability, washing resistance and the like; and the chassis coating spraying method has the advantages that the coating has high particle deposition efficiency, the utilization rate of raw materials can exceed 98%, and the production efficiency in the coating preparation process is high.

Description

technical field [0001] The invention relates to the technical field of polysilicon production equipment, in particular to a reduction furnace chassis and a coating preparation method thereof. Background technique [0002] The improved Siemens method is the mainstream technology for the production of polysilicon in the world. Its core equipment is a reduction furnace. The mixed gas reacts to generate polysilicon and deposits it on the silicon core. The final product is polysilicon deposited on the silicon core, and the product is finally extracted from the reduction furnace in the form of polysilicon rods. [0003] The polysilicon reduction furnace is mainly composed of a chassis and a furnace body. The chassis is the core component of the reduction furnace. The structure and performance of the chassis directly affect the distribution and flow of materials in the furnace, the growth quality of silicon rods, the reduction energy consumption and the reduction furnace. run. Th...

AI Technical Summary

Problems solved by technology

At present, the electrode is insulated and protected by arranging tetrafluoro sleeves and ceramic sleeves in the electrode tank and ceramic sleeves on the electrode head (the part where the electrode is exposed to the surface of the chassis), but due to the high temperature atmosphere in the reduction furnace and the The temperature change when the reduction furnace starts and stops makes the PTFE sleeve very easy to carbonize and fail and the ceramic sleeve is easy to strain and break, which will cause the insulation failure of the reduction furnace chassis and cause production accidents