Laser generator reflecting plate
A technology of laser generators and reflectors, which is applied in sputtering coating, vacuum evaporation coating, coating of superimposed layers, etc., can solve the problems of insufficient bonding, incomplete surface morphology and thickness of aluminum oxide film Problems such as control, detachment of the reflective layer of the aluminum oxide film, etc.
Active Publication Date: 2018-05-08
WUHAN UNIV
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Problems solved by technology
[0003] At present, the limitation of the process of plating aluminum oxide film on the surface of copper substrate leads to the insufficient bonding between the copper substrate and the aluminum oxide film, and the surface morphology and thickness of the aluminum oxide film are not completely controllable
These defects make the aluminum oxide film on the surface of the laser total reflection mirror prone to a decrease in reflectivity during service, and the reflective layer of the aluminum oxide film falls off from the copper substrate due to the absorption of photons and heating during service
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[0025] Below in conjunction with accompanying drawing, the present invention is illustrated, as figure 1 As shown, a laser generator reflector, which consists of a base, a pure chromium layer, a pure aluminum layer and an aluminum oxide film as a reflective layer to form a four-layer structure, the base is a copper substrate with good thermal conductivity, the most It is preferably a pure copper substrate, which is a pure copper substrate in this embodiment. A pure chromium layer is sequentially formed on the upper surface of the pure copper substrate by a deposition method, a pure aluminum layer is formed on the pure chromium layer, and an oxide trioxide layer is deposited and grown on the pure aluminum layer. The di-aluminum film is preferably an α-crystalline aluminum oxide film.
[0026] Preferably, the thickness of the pure chromium layer of the reflection plate of the laser generator is 5-100 nm, the thickness of the pure aluminum layer is 8-10 μm, and the thickness of t...
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The present invention discloses a laser generator reflecting plate. The laser generator reflecting plate is a four-layer structure formed by a substrate, a pure chromium layer, a pure aluminum layer and an aluminum oxide film as a reflection layer. The substrate uses copper materials have a high heat conductivity, a physical vapor deposition method is employed on a copper matrix to deposit a layerof pure chromium film with nanometer thickness under an inert gas protection atmosphere to add the interface bonding intensity of the reflection layer and the copper substrate, the physical vapor deposition method is employed on the pure chromium film to deposit a layer of pure aluminum film with nanometer thickness, and a reaction evaporation method, a multi-sphere ion beam oxidation method or an anodic oxidation method are employed on the surface of the pure aluminum film to prepare the aluminum oxide film configured to reflect a laser. The laser generator reflecting plate is high in stability and excellent in optical performances, the laser reflectivity can reach 80-95%, the weakest interface bonding force is larger than 500MPa, and the service life can reach 2-4 years.
Description
technical field [0001] The invention belongs to the field of laser generator equipment, and relates to a laser generator reflection mirror, in particular to a laser generator reflection plate. Background technique [0002] Laser has the advantages of high energy density and excellent optical coherence, so it has a wide range of applications in industry, information, military and other fields. A large number of laser mirrors are needed in the process of laser generation from the resonant cavity of the generator to output. The laser reflection efficiency, thermal performance, microstructure, defects, and crystal orientation of the mirrors determine the power and service life of high-power lasers. Al2O3 has no absorption peak in the visible to infrared band, and has good mechanical and thermal properties, making Al2O3 thin film an ideal material for laser mirrors, and aluminum oxide film is used on the surface of copper to ensure laser reflection At the same time, it has excel...
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Login to View More IPC IPC(8): G02B5/08C23C28/00C23C14/16C23C14/58
Inventor 薛龙建谭迪黄家辉
Owner WUHAN UNIV