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a lighting device

A lighting device and LED light source technology, which is applied in the field of photolithography, can solve the problems of large energy loss of light source and difficulty in off-axis lighting coupling, and achieve the effects of compact structure, low cost and low energy consumption

Active Publication Date: 2020-01-24
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The invention provides a lighting device to solve the problems of difficult coupling of off-axis lighting and large energy loss of light sources in the prior art

Method used

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Embodiment Construction

[0030] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that all the drawings of the present invention are in simplified form and use inaccurate scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0031] like figure 1 As shown, the present invention provides an illuminating device, comprising: an LED light energy generation unit, a beam integrating uniform light unit and a beam relay transmission unit arranged in sequence along the light propagation direction; wherein, the LED light energy generation unit includes four groups The LED light source assembly and the converging mirror group 30, the multiple groups of LED light source assemblies are distributed rotationally symmetrically along the opt...

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Abstract

The invention discloses a lighting device including an LED light energy generating unit, a beam integral homogenization unit and a beam relay transmission unit along the direction of light propagation, wherein the LED light energy generating unit comprises a plurality of groups of LED light source components and a converging mirror group, and the plurality of groups of LED light source componentsare rotationally symmetrically distributed along the optical axis. Each group of the LED light source component can radially move along the optical axis. The object plane of the converging mirror group is located at the light emitting end of the LED light source component. By setting of the plurality of groups of LED light source components, light sources of a variety of wavelengths can be coupledto directly form an off-axis lighting mode. Compared with a multi-wavelength mercury lamp scheme in the prior art, the lighting device has more compact structure, high energy utilization rate and lowenergy consumption; the LED light source components can move radially along the optical axis to achieve regulation of lighting coherent factors.

Description

technical field [0001] The invention relates to the technical field of photolithography, in particular to an illuminating device. Background technique [0002] The microlithography technology in semiconductor manufacturing is to use the optical system to accurately project and expose the pattern on the reticle to the silicon wafer coated with photoresist. [0003] In order to further enhance the resolution capability of the exposure system, increase the depth of focus, and increase the process window, off-axis illumination (OAI) technology has been widely adopted in the scanning exposure system. Traditional off-axis lighting includes ring lighting, dipole lighting, and quadrupole lighting, etc., and different off-axis lighting pupil distributions are mainly selected according to specific mask patterns. [0004] With the development of LED light source technology, the power of LED light source is getting closer and closer to the demand of high power and high intensity of mod...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
CPCG03F7/7005G03F7/70075G03F7/70091G03F7/7015
Inventor 田毅强
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD