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Thin film temperature sensor chip and manufacturing method thereof

A sensor chip and film temperature technology, applied in the sensor field, can solve the problems of low production efficiency, product oxidation, and high product cost, and achieve the effects of high production efficiency, good bonding force, and low product cost.

Inactive Publication Date: 2018-06-15
雷念程
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the production efficiency is low, the product cost is high, and the product still has oxidation problems in the high temperature section.

Method used

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  • Thin film temperature sensor chip and manufacturing method thereof
  • Thin film temperature sensor chip and manufacturing method thereof
  • Thin film temperature sensor chip and manufacturing method thereof

Examples

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Embodiment Construction

[0030] The preferred embodiments of the present invention will be described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0031] Such as figure 1 , 2 As shown, a thin film temperature sensor chip. First prepare a large sheet of substrate material 1 , process the substrate material 1 into a size of 4 inches or 6 inches or 8 inches or 12 inches by mechanical processing or laser cutting, and process the substrate material 1 with positioning edges 12 at the same time. The substrate material may be ceramics, glass-ceramics, silicon, sapphire, silicon carbide, aluminum nitride, etc., and in this embodiment it is a silicon wafer.

[0032] The processed substrate material 1 is put into a high-temperature annealing furnace for annealing treatment according to technological requirements. Take...

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PUM

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Abstract

The invention discloses a thin film temperature sensor chip and a manufacturing method thereof. The manufacturing method comprises the steps of preparing a substrate material, processing the substratematerial, and annealing the substrate, grinding and polishing, and depositing a transition layer, an insulating layer, a thin film resistor layer and a contact layer at the atomic level in an atomicfilm deposition system, and then forming a temperature sensitive resistor by photoetching; performing secondary protection film preparation and photoetching, cutting and separating into sensitive units, leading out signal lines, and forming a thin film temperature sensor chip. Due to the fact that the substrate material is made by large-area whole material, the production efficiency is high, the product cost is low, the consistency is good, and the product performance is excellent.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a thin-film temperature sensor chip and a manufacturing method thereof. Background technique [0002] Temperature sensor is a precision measurement device for measuring temperature, mainly including infrared radiation temperature sensor, thermal resistance temperature sensor, thermistor temperature sensor, thermocouple temperature sensor, optical fiber temperature sensor and other types. These temperature sensors have their own advantages and disadvantages, some have better sensitivity in the medium and low temperature range (-200 ~ 650 °C), and some have better linearity in the high temperature range. [0003] At present, the main thermistor material is metal platinum, which has good linearity and measurement accuracy; in addition, nickel is commonly used, its temperature coefficient of resistance is higher than that of platinum, and its sensitivity is higher; copper is also a g...

Claims

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Application Information

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IPC IPC(8): G01K7/18
CPCG01K7/18
Inventor 雷念程
Owner 雷念程
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