A modulator for regulating the amplitude of terahertz waves and its manufacturing method
A manufacturing method and modulator technology, which can be used in instruments, nonlinear optics, optics, etc., and can solve problems such as large metal loss and long carrier lifetime.
Active Publication Date: 2020-01-03
UNIV OF SCI & TECH OF CHINA
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Problems solved by technology
[0004] However, the existing methods for regulating terahertz waves are all based on the composite structure of metal and single crystal silicon, in which the loss of metal is relatively large, and the carrier lifetime of silicon is very long
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[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0034] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0035] Such as figure 1 and figure 2 as shown, figure 1 A schematic cross-sectional view of a modulator for regulating the amplitude of a terahertz wave provided by an embodiment of the present invention; fig...
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Abstract
The invention discloses a modulator for regulating Terahertz wave amplitude and a manufacturing method. The modulator comprises a substrate and a silicone structure array, wherein the substrate comprises an upper surface and a lower surface arranged opposite to each other; and the silicone structure array containing alloying elements arranged on the upper surface of the substrate comprises a plurality of array units arranged in an array. The silicone structure array containing alloying elements in the modulator also plays roles of providing electromagnetic resonance and being sensitive to external optical pumping. As pumping is generated to the silicone structure arrays containing the doping elements by means of external femtosecond laser and massive free carriers are excited, the modulator can control exciting and compounding processes of the free carriers by controlling the time delay between the pumping laser and the Terahertz detection wave so as to achieve active adjustment on Terahertz wave amplitude.
Description
technical field [0001] The invention relates to the technical field of devices for actively controlling the amplitude of electromagnetic waves, and more specifically, to a modulator and a manufacturing method for regulating the amplitude of terahertz waves. Background technique [0002] The device that actively controls the amplitude of electromagnetic waves is a very important device in many electromagnetic wave bands such as microwave, terahertz wave, mid-far infrared and optical fiber communication. [0003] For the terahertz band (0.1THz-10THz), since natural materials have a weak response to terahertz waves, metamaterials with artificial periodic structures are often used to regulate terahertz waves. In order to realize the active regulation of terahertz waves, researchers often combine metamaterials with some tunable materials such as graphene, silicon or germanium to regulate terahertz waves. Among them, single crystal silicon is a semiconductor material with excelle...
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IPC IPC(8): G02F1/015
CPCG02F1/015
Inventor 陆亚林蔡宏磊黄秋萍
Owner UNIV OF SCI & TECH OF CHINA