A kind of preparation method of solar cell
A solar cell and back electrode technology, applied in circuits, electrical components, photovoltaic power generation, etc., can solve the problems of expensive equipment, complex solar cell process, low production line matching, etc., to reduce production costs, low breakage rate, The effect of high conversion efficiency
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Embodiment 1
[0039] Such as figure 1 As shown, the realization process of a preparation method of a solar cell structure that reduces electrode recombination:
[0040] The P-type silicon wafer (p-si) used as the substrate (the thickness of the substrate P-type silicon wafer is 180±10um) is subjected to the texturing and cleaning step 101. If the silicon wafer is a single crystal silicon wafer, then 101 uses alkali texturing, Form a uniform pyramid distribution on the surface of the silicon wafer. If the silicon wafer is polycrystalline, 101 uses acid texturing to form a pit-like surface on the surface.
[0041] After the texturing and cleaning step 101 is completed, a silicon nitride film 102 is grown on the corresponding position of the busbar region of the positive electrode, and the thickness of the silicon nitride film is 80 nm.
[0042] Then high temperature diffusion is performed to form the emitter 103, and the silicon nitride film growth region will have a significantly lower diff...
Embodiment 2
[0052]The preparation method is basically the same as that of Embodiment 1, except that the silicon nitride film 105 is deposited on the diffusion surface by plasma enhanced (PECVD) method, and then the silicon nitride film 106 is deposited on the back electrode region.
[0053] Using the above method to prepare 10,000 solar cells, and crushing 15 of them, the average conversion efficiency of 10,000 solar cells is 18.85%.
Embodiment 3
[0055] The preparation method is basically the same as that of Example 1, except that the positive electrode main grid printing 110 is performed first, and then the positive electrode fine grid printing 109 is performed.
[0056] Using the above method to prepare 10,000 solar cells, and 0 pieces were broken, the average conversion efficiency of 10,000 solar cells was 18.9%.
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