SiAlCN wireless passive temperature sensor loaded with patch antenna and preparation method
A technology of temperature sensor and patch antenna, which is applied in the direction of antenna, thermometer, and thermometer with electric/magnetic elements that are directly sensitive to heat, etc. It can solve the problem of low working temperature, short test distance of wireless passive sensors, and difficult measurement methods. And other issues
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[0042] The present invention will be further described below by means of embodiments in conjunction with the accompanying drawings.
[0043] The preparation method of the SiAlCN wireless passive temperature sensor loaded with patch antenna comprises the following steps:
[0044] 1. Mix polysilazane and 0.3 g of aluminum sec-butoxide in a mass ratio of 90:10, and stir the mixture on a magnetic stirrer under the protection of nitrogen atmosphere for 24 hours at a temperature of 80°C. A light yellow precursor mixture was obtained.
[0045] 2. Pour the mixture into a tin foil box, put it into a tube furnace, and then raise the temperature to 160°C for 4 hours to carry out thermal crosslinking. The whole process is protected by a nitrogen atmosphere, and naturally cooled to room temperature to obtain a block precursor.
[0046] 3. Crush the obtained massive precursor body, and grind it into powder with a ball mill, with a particle diameter of about 1 μm. The frequency of the vibr...
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