Method for producing superconducting single crystal thin film

Abstract

The invention discloses a method for producing a superconducting single crystal thin film. The method comprises the following steps: adding an initial laminated structure into a reaction solution in areaction tank, wherein the initial laminated structure includes at least one substrate and a seed crystal layer attached to the at least one substrate; adjusting the temperature of the reaction solution to a predetermined temperature, and keeping the predetermined temperature for a predetermined time to form a product laminated structure, wherein the product laminated structure comprises the at least one substrate, the seed crystal layer and at least one superconducting single crystal thin film; taking out the product laminated structure from the reaction solution, and flushing and drying theproduct laminated structure; and separating the at least one superconducting single crystal thin film from the at least one substrate and the seed crystal layer, wherein the reaction solution includes a solvent and an inorganic precursor, and the inorganic precursor provides active ions for the component of the superconducting single crystal thin film. The method uses the inorganic precursor to provide the active ions and adopts the seed crystal layer as a growth template in order to form the large-size and high-quality superconducting single crystal thin film.

Description

technical field [0001] The invention relates to the field of thin film materials, more specifically, to a method for manufacturing a superconducting single crystal thin film. Background technique [0002] In the practical application and basic research of high-temperature superconducting materials, high-quality superconducting single crystal thin films play an important role. The physical properties of superconducting single crystal thin films are stable, high current density and superconducting transition temperature can be achieved, so they are the basic materials for the development of high-frequency electronic devices and Josephine junction electronic devices. Superconducting single crystal thin films can be produced by physical or chemical methods. Physical methods include magnetron sputtering, electron beam evaporation, molecular beam epitaxy, pulsed laser deposition, etc. Chemical methods include metal organic compound vapor deposition, aerosol deposition, sol gel me...

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Problems solved by technology

[0003] However, most of the above-mentioned existing deposition processes require epitaxial growth in a vacuum chamber. The growth equipment is expensive, the types of growth materials are limited, the growth conditions are harsh, the growth cycle is long or the size of the grown film is small, which is difficult to meet practical applications. needs

The sol-gel method can produce high-quality single-crystal thin films, but the crystal quality is related to the thickness of the film, which is not suitable for the manufacture of large-area single-crystal thin films.

The thermal decomposition process used in the sol-gel method is also an important factor affecting the electrical and mechanical properties of the film, resulting in poor controllability of the manufacturing process

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