Diamond window sealing device and fabrication method thereof

A technology of diamond and diamond film, which is applied in the manufacture of semiconductor devices, electrical components, and final products, etc., can solve the problems of difficult rework of the welding process, difficulty in sealing or encapsulating the main equipment, cracking of the sealing material, etc. The effect of reducing the difficulty of application, easy repair or replacement

Active Publication Date: 2018-07-27
CHANGSHA ADVANCED MATERIALS IND RES INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Diamond film, as an infrared optical window device, must be packaged with the main device, but diamond itself has extremely high hardness and excellent chemical inertness, which makes it difficult to process the diamond film, and it is difficult to form a good seal or package with the main device
[0005] Existing diamond window sealing method mainly adopts the method of welding, but the meth

Method used

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  • Diamond window sealing device and fabrication method thereof
  • Diamond window sealing device and fabrication method thereof
  • Diamond window sealing device and fabrication method thereof

Examples

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Embodiment 1

[0037] 1. Spin-coat PMMA on the clean diamond surface, expose the PMMA on the edge of the diamond with an electron beam, and obtain a photoresist pattern after development, and the diamond at the edge is exposed.

[0038] 2. Using electron beam evaporation method in figure 1 A layer of titanium metal was vapor-deposited on the upper surface of the sample shown, with a thickness of about 50 nm. The sample was soaked in acetone solution for 30 minutes, and the PMMA layer was removed to obtain a diamond window sample coated with metal titanium around the periphery.

[0039] Then bake at 500°C for 30 minutes in a vacuum or inert environment, so that the metal and diamond form a firm C-metal compound.

[0040] Then adopt the electroplating method to electroplate a layer of 2.5mm thick copper layer on the metal titanium layer, and polish the copper layer to obtain a diamond window sealing device with a copper layer thickness of about 2mm and a smooth and flat surface (such as figu...

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Abstract

The invention provides a diamond window sealing device and a fabrication method thereof. The diamond window sealing device comprises a diamond membrane, a first metal layer, a Cu layer or an Al layerand a knife edge, wherein the first metal layer is deposited at an edge of the diamond membrane, the Cu layer or the Al layer is arranged on the first metal layer, and the knife edge is used for pressing the two metal layers and performing packing with main equipment. Compared with the prior art, a layer of metal Cu or Al is electroplated after surface metallization of diamond, a condition is created for sealing, so that a complicated welding process can be substituted by a simple knife edge sealing method; and by the diamond window sealing device provided by the invention, a diamond window standard device can be fabricated in mass production, the process is simple and practical, moreover, the diamond window sealing device is very convenient to repair or replace, and the application difficulty of the diamond window device is greatly reduced.

Description

technical field [0001] The invention relates to the technical field of diamond processing and packaging, in particular to a new diamond window sealing device and a preparation method thereof. Background technique [0002] With the development of military infrared technology, the requirements for the environmental tolerance of infrared optical components are getting higher and higher, especially the front windows in military infrared imaging systems are often used in harsh environments such as high temperature, high humidity, and atmospheric friction. environment (such as tanks, airborne windows, etc.), so the requirements for infrared film materials are very strict. [0003] Diamond film has ultra-high hardness and wear resistance, stable chemical properties, and can also withstand various strong acids and alkalis and chemical solvents, and diamond has good permeability in almost the entire infrared region, with a high refractive index. The most preferred material for optic...

Claims

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Application Information

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IPC IPC(8): H01L31/0203H01L31/028H01L31/18
CPCH01L31/0203H01L31/028H01L31/1804Y02P70/50
Inventor 黄翀曾凡初
Owner CHANGSHA ADVANCED MATERIALS IND RES INST CO LTD
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