Target module and machining method

Abstract

The invention relates to the technical field of machining, and provides a target module and a machining method. The target module comprises a target and a back plate for bearing the target. The surface of the target comprises a front surface and a back surface; the front surface of the target is a sputtering surface of the target; the back surface of the target is opposite to the front surface ofthe target; a first step is projected on the back surface of the target; and the side surface of the first step is an inclined surface. A first groove matched with the first step is formed in the front surface of the back plate; the back surface of the target and the front surface of the back plate are connected through dispersion welding; and the first step is embedded in the first groove. In thedispersion welding process, the back surface of the target is tightly bonded with the front surface of the back plate; and a finally molded target module generates no welding line in the joint position of the two, so that the sputtering performance of the target can be improved, meanwhile, the problem related to the welding line cannot occur in subsequent machining process of the target module, and the quality of the produced target module is improved.

Description

technical field [0001] The invention relates to the field of mechanical processing, in particular to a target component and a processing method. Background technique [0002] Diffusion welding refers to a solid-state welding method that pressurizes workpieces at high temperatures without visible deformation and relative movement. Diffusion welding is especially suitable for the joining of new materials such as dissimilar metal materials, heat-resistant alloys and ceramics, intermetallic compounds, and composite materials. During the processing of the target assembly, the target and backing plate are usually welded together by diffusion welding. However, in the prior art, after the target and the back plate are welded, obvious weld seams are easily left at the joint position. During the sputtering process of the target, the remaining weld seams will affect the air flow direction on the surface of the target component. , leading to a decrease in the sputtering performance of...

AI Technical Summary

Problems solved by technology

However, in the prior art, after the target and the back plate are welded, obvious weld seams are easily left at the joint position. During the sputtering process of the target, the remaining weld seams will affect the air flow direction on the surface of the target component. , leading to a decrease in the sputtering performance of the target, and at the same time, in the subsequent processing of the target assembly, the residual weld seam may further expand, resulting in serious quality problems such as target deformation

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