Vanadium-aluminum alloy target and preparation method thereof

A technology of aluminum alloy and vanadium aluminum alloy, which is applied in the field of alum aluminum alloy target material and its preparation, can solve the problems affecting the stability of thin film sputtering preparation, the inability to obtain alum aluminum alloy target material, target density and structural fluctuations, etc. problem, to achieve the effect of simple and easy powder making method, good sputtering performance and good uniformity

Inactive Publication Date: 2015-09-30
深圳市威勒科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The so-called hot melting method is to melt the required proportion of alum and aluminum and then cool it to obtain an alloy target. Because the melting points of vanadium and aluminum are different and the density is very different, it is impossible to obtain a uniform alum aluminum alloy target. During the solid-state cooling process, the temperature of the target material changes in a large gradient from the inside to the outside, so the structure of the target material has a large non-uniformity, which affects the VO 2 Stability in thin film sputtering preparation
The powder hot pressing method is to uniformly mix the alum aluminum powder in a certain mass ratio and then form the alum aluminum alloy target by hot pressing and vacuum sintering. Although it can obtain a uniformly mixed target material, the pressing process of this method requires the design of a special mold. The porosity is high, and the service life of the target is short, so that the cost of film preparation is high, and due to the influence of various factors in hot pressing, different batches of targets have large fluctuations in density and structure, which affects the film preparation process Medium sputtering yield, ultimately affecting VO 2 Film properties

Method used

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  • Vanadium-aluminum alloy target and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Step 1: Use vanadium powder with a particle size of 5-20um and a purity greater than 99.5%, and then calculate according to the vanadium-aluminum mass ratio of 99:1-95:5, add aluminum powder with a purity greater than 99.5% and a particle size of less than 150um, and roller mix Mix with the material machine, the speed is 60-100r / min, and the time is 0.5-2h. The main function of this step is to fully mix the vanadium powder and aluminum powder to prepare for the next step of mixing with the binder, because the binder is viscous, if the vanadium powder and aluminum powder are directly mixed with the binder Mixing together will make vanadium powder and aluminum powder unable to mix evenly.

[0026] Step 2: Add the above-mentioned mixed composite powder, 200-300ml ethanol, and 0.5-0.75kg cemented carbide balls into the ball mill jar, grind at 100-300r / min for 4-24 hours under an argon atmosphere, and grind the ground powder Take it out and place it in a fume hood for 10-30...

Embodiment 2

[0032] Step 1: Use vanadium powder with a particle size of 50-150um and a purity of 99.5-99.9%, and then calculate according to the mass ratio of vanadium to aluminum of 99:1-95:5, and add the corresponding quality of aluminum powder (purity above 99.5%, particle size 20-50um) , mixing with a drum mixer, the speed is 60-100r / min, and the time is 0.5-2h. The effect of this step is the same as that of step 1 in Example 1.

[0033] Step 2: Weigh the alkyd varnish, measure 200# gasoline, the volume ratio of the two is 1:30~3:30, add the two into the mixer, set the speed of the mixer at 60~100r / min, and stir for 15min~ 30min prepared into a binder for use. The binder prepared in this step is durable and has strong viscosity, and can strongly bind the vanadium powder and the aluminum powder together.

[0034] Step 3: Put the composite powder in step 1 into the mixer, pour the binder prepared in step 2, start the mixer, set the stirring speed to 60~100r / min, and the time is 1~3h, t...

Embodiment 3

[0042] Step 1: Use vanadium powder with a particle size of 20-50um and a purity greater than 99.5%, and then calculate according to the vanadium-aluminum mass ratio of 99:1-95:5, and add aluminum powder with a purity greater than 99.5% and a particle size of 20-50um or less. Mix with a drum mixer at a speed of 60-100r / min for 0.5-2 hours. The effect of this step is the same as that of step 1 in Examples 1 and 2.

[0043] Step 2: Add the above mixed composite powder, 200-300ml of ethanol, 0.5-0.75kg of cemented carbide balls into the ball mill jar, grind at 100-300r / min for 8-48 hours under argon atmosphere, and grind the ground powder Take it out and place it in a fume hood for 10-30 minutes. The effect of this step is the same as that of step 2 in Example 1.

[0044] Step 3: Put the composite powder in step 2 into a blender, 1.25-12.5 parts of polyethylene glycol PEG400, 12-96 parts of ethanol, 1-10 parts of defoamer, the above-mentioned defoamer is selected from emulsified...

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Abstract

The invention provides a vanadium-aluminum alloy target and a preparation method thereof. The target consists of vanadium powder, aluminum powder and a binding agent, wherein the mass ratio of the vanadium powder to the aluminum powder is 19: 1-3: 2; and the purities of the vanadium powder and the aluminum powder are higher than 99.5%. The preparation method comprises the following steps: the vanadium powder and the aluminum powder are weighed out according to a certain proportion, and are fully and uniformly mixed; the binding agent is added in the vanadium powder and the aluminum powder for further uniform mixing to obtain a dry composite powder material of the vanadium and aluminum powders and the binding agent; the plasma spraying operation is performed for the composite powder material in the step (2); and a component obtained by spraying is taken down, and is treated to obtain a finished product. The vanadium-aluminum alloy target is excellent in uniformity and high in stability. The preparation method adopts the plasma spraying mode, is simple and feasible, needs no mold design or expensive pressing equipment, and is convenient to operate; and the prepared target is excellent in sputtering performance, few in impurities and suitable for optical film coating.

Description

technical field [0001] The invention relates to a material and a preparation method thereof, in particular to an alum aluminum alloy target material and a preparation method thereof. Background technique [0002] Vanadium dioxide (VO 2 ) thin film is a vanadium oxide thin film with unique phase transition characteristics. It exhibits semiconducting properties at low temperature and high infrared transmittance, while it exhibits metallic properties after high temperature phase transition and high reflectivity to infrared. And its phase transition temperature is 68° C., and the phase transition temperature can be increased by metal aluminum (Al) doping. Therefore, vanadium dioxide thin films have very broad application prospects in the fields of intelligent energy-saving windows and optical switches. VO 2 There are many methods for thin film preparation, among which reactive magnetron sputtering technology is the VO 2 The most commonly used preparation technique for thin f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C22C27/02C23C4/06C23C4/12
Inventor 徐玄顾进跃顾伟华李巧梅马辉
Owner 深圳市威勒科技股份有限公司
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