Application of photoexcited gas-sensitive sensing test system

A gas sensing and testing system technology, applied in the field of gas sensing sensors, to increase the tunneling probability, change the adsorption capacity, and improve the response performance.

Inactive Publication Date: 2018-10-16
SHANGHAI DIANJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The technical problem to be solved by the present invention is: solve the problem of how to make the metal oxide semiconductor gas sensor work without installing the heating wire

Method used

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Examples

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Embodiment Construction

[0013] In order to make the present invention more comprehensible, preferred embodiments are described in detail as follows.

[0014] The present invention is an application of a light-excited gas-sensitive sensor testing system, which comprises the following steps:

[0015] Taking the sensing response of ZnO-based semiconductor sensor devices in alcohol gas as the test object, the ZnO nanomaterials were dissolved in deionized water to configure a solution concentration of 20mol / L, and the prepared suspension solution was deposited (generally by chemical vapor phase ZnO nanomaterials are prepared by deposition or hydrothermal method, and then configured into a solution. During deposition, the micro-syringe absorbs and deposits on the metal electrode.) On the metal electrode, a detector with an electrode is formed after drying (that is, a ZnO-based semiconductor sensor device) , and then put the detector with electrodes into the test cavity of the semiconductor tester, bring th...

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PUM

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Abstract

The invention discloses an application of a photoexcited gas-sensitive sensing test system. The application comprises the following steps: placing a sensor for a broadband gap semiconductor in the test chamber of a semiconductor tester at room temperature, introducing a gas to be tested into the test chamber of the semiconductor tester, making an ultraviolet light source close to the test chamberof the semiconductor tester, connecting the sensor for the broadband gap semiconductor with the semiconductor tester, and detecting the obvious increase of the response value of induced current by thesemiconductor tester. Electrons and holes introduced by illumination change the state of defects in a material, change the adsorption capacity and the adsorption center concentration of metal oxide semiconductor surfaces, and effectively improve the response performances of the surfaces, so gas-sensitive elements can realize the application and test process of the sensor under low working temperature conditions.

Description

technical field [0001] The invention relates to the application of a light-excited gas-sensitive sensor testing system, belonging to the technical field of gas-sensitive sensors. Background technique [0002] Resistive gas sensors based on semiconducting metal oxide materials are by far the most widely used. This type of sensor has the advantages of high sensitivity, convenient operation, small size, low cost, short response time and recovery time, etc., so it occupies a dominant position in the current gas sensor test application and research. [0003] At present, in the gas sensor test system, it is usually necessary to install a heating wire on the gas sensor to make it work near the peak sensitivity temperature, so that the working temperature is mostly higher than room temperature. Usually, the working temperature of the metal oxide semiconductor gas sensor is generally 175~ In the range of 425°C, higher sensitivity and faster response time can be obtained. [0004] B...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00
CPCG01N27/00
Inventor 叶小亮
Owner SHANGHAI DIANJI UNIV
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