A continuous coating production line based on revolution and rotation loading pallets
A coating production line, revolution and rotation technology, applied in the direction of sputtering coating, vacuum evaporation coating, ion implantation coating, etc., can solve the problems of limitations, differences in operation methods and production processes, and the inability to form batch production, etc., to reduce participation State, stable process gas, effect of ensuring stability
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[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0030] Please refer to Figure 1-Figure 9, the present invention provides the following technical solutions:
[0031]A continuous coating production line based on a male-rotating loading tray, including a male-rotating tray (1), a feeding module (2), a vacuum isolation valve module (3), a sheet-feeding vacuum process module (4), and a coating vacuum process module (5 ), vacuum process module (6) and discharge module (7); the male self-rotating tray (1) consists...
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