Laminated film
A film and oxide layer technology, applied in the field of laminated films, can solve the problems of chemical resistance, acid resistance and insufficient alkali resistance of transparent oxide films, and achieve excellent chemical resistance, excellent moisture permeability and gas barrier. sexual effect
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Embodiment 1
[0071] A commercially available COP film (manufactured by Zeon Corporation, trade name "ZEONOR", thickness 40 μm) was used as a substrate, and a film containing Al, SiO 2 and a sputtering target of ZnO, a first oxide layer (30 nm in thickness) was formed on the substrate by DC magnetron sputtering. Next, using a Si target, a second oxide layer (50 nm) was formed on the first oxide layer of the substrate / first oxide layer laminate. In this way, a substrate / first oxide layer (AZO) / second oxide layer (SiO 2 ) The composition of the laminated film. The obtained laminated film was subjected to the evaluations of (2) to (6) above. The results are shown in Table 1.
Embodiment 2
[0073] A laminated thin film was produced in the same manner as in Example 1 except that the thickness of the second oxide layer was set to 60 nm. The obtained laminated film was subjected to the same evaluation as in Example 1. The results are shown in Table 1.
Embodiment 3
[0075] A laminated thin film was produced in the same manner as in Example 1 except that the thickness of the second oxide layer was set to 80 nm. The obtained laminated film was subjected to the same evaluation as in Example 1. The results are shown in Table 1.
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Abstract
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