Process method for prolonging service life of upper electrode of etching machine table

A process method and etching machine technology, applied in metal material coating process, anodic oxidation, electrolytic coating, etc., can solve the problems that affect the production capacity of the equipment, the yield rate of the glass substrate, the particles at the pores, and the inability to meet the use requirements, etc., to achieve excellent Plasma etching gas corrosion resistance, excellent plasma etching gas corrosion resistance, and high compactness

Active Publication Date: 2018-12-11
芜湖通潮精密机械股份有限公司
View PDF2 Cites 12 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

With the development of the liquid crystal panel industry, higher requirements are placed on the life time of the etching chamber. In addition, the plasma etching atmosphere in the high-generation (G8.5, G10.5) etching chamber is even harsher. The etching power is also getting higher and higher, and the gas holes of the

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Process method for prolonging service life of upper electrode of etching machine table
  • Process method for prolonging service life of upper electrode of etching machine table
  • Process method for prolonging service life of upper electrode of etching machine table

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0042] Example 1

[0043] A process method for improving the service life of electrodes on an etching machine, including the following steps

[0044] (1) The upper electrode is made of aluminum parts, which must be degreased and polished first;

[0045] (2) Mask before sandblasting: use figure 2 The structure shown is set to be protected before sandblasting, and only 5~12mm around the air hole is sandblasted and coarsened. figure 2 The thickness of the middle sandblasting protection fixture is 3mm, the material is Al or SUS, and the fixture diameter is 6mm. Use temperature-resistant double-sided tape to adhere the fixture and the upper electrode;

[0046] (3) Sandblasting: use white corundum sand material, mesh number 60#, sandblasting pressure 0.3Mpa, sandblasting distance 300mm, after sandblasting, the roughness around the pores reaches Ra 3.5μm;

[0047] (4) Cleaning and drying: Remove the masking of the upper electrode surface, first use a dust-free cloth dipped in acetone to rem...

Example Embodiment

[0055] Example 2

[0056] A process method for improving the service life of electrodes on an etching machine, including the following steps

[0057] (1) The upper electrode is made of aluminum parts, which must be degreased and polished first;

[0058] (2) Mask before sandblasting: use figure 2 The structure shown is set for protection before sandblasting, and only the 12mm around the air hole is sandblasted and coarsened. figure 2 The thickness of the middle sandblasting protector is 5mm, the material is Al or SUS, and the diameter of the fixture is 10mm. In order to prevent the jig from sliding with the surface of the upper electrode due to the action of sand material or compressed air during the sandblasting process, resulting in an error in the blasting range and scratches on the upper electrode surface, use figure 2 The shown double-sided tape adheres the fixture and the upper electrode;

[0059] (3) Sandblasting: use white corundum sand material, mesh number 100#, sandblasti...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Roughnessaaaaaaaaaa
Thicknessaaaaaaaaaa
Roughnessaaaaaaaaaa
Login to view more

Abstract

The invention discloses a process method for prolonging the service life of an upper electrode of an etching machine table. The process method comprises the following steps of 1, shielding a sand blasting space around air holes of the upper electrode; then, performing sand blasting roughening treatment; 2, removing shelters and sand material impurities; 3, performing anodization on the upper electrode surface to form an anodization membrane; 4, shielding a spray coating space around the air holes of the upper electrode; then, spraying and coating a ceramic coating; 5, removing shelter impurities; then, performing drying treatment. The service life of the upper electrode can be effectively prolonged; the corrosion resistant performance is excellent.

Description

technical field [0001] The invention belongs to the technical field of anti-etching of electrodes, and in particular relates to a process method for improving the service life of electrodes on an etching machine. Background technique [0002] The dry engraving machine is the key equipment in the process of preparing liquid crystal panels. The upper electrode is the key component in the dry engraving machine. The surface of the upper electrode is evenly covered with pores (0.5-1mm), see figure 1 shown. When the etching machine is working, the plasma etching gas enters the etching chamber through the pores, and the pores on the surface of the upper electrode realize the uniform distribution and adjustment of the plasma etching gas. A voltage is applied between the upper electrode and the lower electrode, and a high voltage is formed between the upper and lower electrodes. Electric field, the plasma etching gas bombards the stripped substrate under the action of a high voltage...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): C25D11/04C25D11/16C23C4/134C23C4/10
CPCC23C4/10C25D11/04C25D11/16C23C4/134
Inventor 何新玉司奇峰王慧赵浩
Owner 芜湖通潮精密机械股份有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap