A method and device for combined processing of microholes with long pulse laser and plasma jet

Abstract

The invention discloses a method and a device for the long-pulse laser and plasma jet composite processing of a micropore, and relates to the field of laser processing. The method for the long-pulse laser and plasma jet composite processing of the micropore comprises the following steps: (1) a workpiece is clamped on a workpiece fixture; (2) the clamped workpiece is subjected to cutter setting through a machine tool positioning system; (3) the laser drilling of the micropore is started; and (4) when the workpiece is drilled, a laser head stops emitting lasers and rotates around a rotating shaft by 90 degrees, so that a plasma jet nozzle can directly face the position of the micropore, and at the time, an alternating-current high-voltage power source can be provided for a plasma jet device.The device for the long-pulse laser and plasma jet composite processing of the micropore comprises a laser device, a power source box, the laser head, a CCD camera, a light guide pipe, an x-y movingplatform, a z-direction moving mechanism, the workpiece fixture, and the plasma jet device. According to the method and the device for the long-pulse laser and plasma jet composite processing of the micropore, the long-pulse laser drilling technology and the plasma jet surface treatment technology are combined, so that molten slag on the inner wall of the micropore can be cleared, the performanceof the inner wall can be changed, the quality of the micropore can be effectively improved, and the problem about the removal of spatters on the surface of a micropore mouth after laser drilling can be solved.

Description

technical field [0001] The invention relates to the field of laser microhole processing, in particular to a method and device for composite processing microholes with long pulse laser and plasma jet. Background technique [0002] Plasma (Plasma) is a form of matter mainly composed of free electrons and charged ions. It exists widely in the universe and is often regarded as the fourth state of matter. It is called plasma state, or "super gas state". Also known as "plasma". [0003] For low-pressure discharge, due to the low density of the gas, the collision frequency between electrons and neutral particles is relatively low, so electrons are easier to obtain higher energy under the action of an electric field. This makes ionization easier to occur, resulting in a higher density plasma that is easier to obtain under low pressure conditions. At this time, the concentration of active particles is relatively high, while keeping the temperature of the gas at a low level. This ma...

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Problems solved by technology

However, for the drilling of high-precision instruments, it is necessary to drill high-quality group holes, such as aeroengine turbine blades. The quality of the film cooling hole is also very high. In addition to the taper and roundness to evaluate the quality of the hole, the quality of the inner wall of the hole is also very important. The hole wall will have problems such as recasting layer, microcracks, and slag. There will be a lot of slag splash nearby, once it solidifies it will be troublesome to remove

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