Micro-scale flexible composite ultrahigh pressure sensor and manufacturing method thereof

Abstract

The invention discloses a micro-scale flexible composite ultrahigh pressure sensor and a manufacturing method thereof. The sensor comprises a substrate; a constantan sensitive element and first electrodes are sputtered on the substrate through an MEMS process; the input end and the output end of the constantan sensitive element are connected with the two first electrodes respectively; the surfacesof the constantan sensitive element and the first electrodes are covered with an insulating layer; a manganin sensitive element and second electrodes are sputtered on the insulating layer through theMEMS process; the input end and the output end of the manganin sensitive element are connected with the two second electrodes respectively; and the manganin sensitive element and the constantan sensitive element are arranged in a vertical alignment mode, the second electrodes and the first electrodes are arranged in a vertical manner of a transverse axis, and the surfaces of the manganin sensitive element and the second electrodes are coated with a protective layer. The sensor has the characteristics of small sizes of the sensitive elements, high measuring range, high precision, large outputsignal, flexibility and the like, is suitable for measurement of micro-scale explosive-loading detonation pressures under multiple working conditions, and also can be expanded to the measurement of other micro-scale axisymmetric dynamic high-pressure flow field pressures.

Description

technical field [0001] The invention belongs to the technical field of flexible sensors and ultra-high pressure sensors, and in particular relates to a microscale flexible composite ultra-high pressure sensor and a manufacturing method thereof. Background technique [0002] With the development of MEMS pyrotechnics and small arms ammunition, the measurement of detonation pressure at the microscale has become an urgent problem to be solved. Manganese copper with piezoresistive effect is widely used in defense fields such as the measurement of ultra-high pressure generated by explosive shock waves of weapons and ammunition and explosive detonation waves due to its high sensitivity, fast response, good linearity, and small temperature coefficient of resistance. . However, in the case of micro-scale charges, the bending effect of the detonation wavefront of explosives is enhanced and becomes a two-dimensional convex spherical wavefront. Therefore, in addition to the change of ...

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Problems solved by technology

The sensitive element of this sensor is large in size, which is not suitable for the measurement of micro-scale explosion pressure; the thicker insulating layer makes the upper manganese copper sensitive element and the lower constantan sensitive element in different pressure environments, which will lead to the inability to use the constantan The copper sensitive element can well eliminate the lateral tensile error in the manganese copper sensitive element; and the organic insulating layer has poor insulation performance under high voltage, which will cause the current leakage of the upper and lower layers, resulting in signal distortion

In addition, if it is necessary to measure the ultra-high pressure at a certain position on the curved surface, the ultra-high pressure sensor with a hard substrate (such as a ceramic substrate or a mica substrate) is not suitable

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