PERC battery back passivation process

A technology of backside passivation and process, applied in the direction of circuits, electrical components, sustainable manufacturing/processing, etc., can solve the problems of low short-circuit current, long time consumption, low long-wave reflection, etc., to reduce the cost of use, improve conversion efficiency, The effect of increasing reflectivity

Inactive Publication Date: 2019-01-11
EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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Problems solved by technology

[0006] However, the back plating of P-type batteries uses atomic layer growth technology for alumina, which is slow and takes a long time, whi

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  • PERC battery back passivation process

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Embodiment Construction

[0028] The present invention will be described in detail in conjunction with accompanying drawing now. This figure is a simplified schematic diagram only illustrating the basic structure of the present invention in a schematic manner, so it only shows the components relevant to the present invention.

[0029] A kind of PERC battery rear passivation process of the present invention comprises the following steps:

[0030] a. The first layer of silicon oxide coating: Put the polished silicon wafer into the graphite boat and enter the tubular PECVD coating equipment. The temperature in the furnace is stabilized at 450±50°C. Open the RF power to complete the first layer of coating on the surface of the silicon wafer;

[0031] b. The second layer of aluminum oxide coating: Put the silicon wafer into the atomic deposition chamber, pass through trimethylaluminum and water vapor, and conduct atomic deposition at a temperature of 200±30°C to complete the second layer of coating on the ...

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Abstract

The invention relates to a PERC battery back passivation process. During the perc battery process, flocking, diffusing, phosphorus wash, and then silicon oxide is first oxidized on the back surface ofthe passivation layer after the phosphorus is washed. Then add alumina, heat treatment process, back silicon nitride using four layers and multi-layers, adding one step of silicon oxide passivation before alumina passivation, can reduce alumina thickness, reduce alumina raw material reaction cost, increase long-wave reflection, improve conversion efficiency, and increase short-circuit current ofperc battery Compared with the prior art, the backside passivation process of the PERC battery provided by the invention can keep the same efficiency with the prior art and improve the efficiency by 0.10%, and the passivation and impurity absorption effects are improved.

Description

technical field [0001] The invention relates to the technical field of solar cell panels, in particular to a back passivation process of PERC cells. Background technique [0002] PERC technology, that is, passivated emitter back contact, can greatly reduce the electrical recombination rate of the back surface by forming a passivation layer on the back of the solar cell, form a good internal optical back reflection mechanism, and increase the open circuit voltage and short circuit current of the battery, thereby improving The conversion efficiency of the battery. [0003] PERC solar cell has the advantages of simple process, low cost, and high compatibility with existing cell production lines. It is a newly developed high-efficiency solar cell. It has received extensive attention from the industry and is expected to become the mainstream direction of high-efficiency solar cells in the future. . [0004] For the production of conventional silicon solar cells, the production ...

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Application Information

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IPC IPC(8): H01L31/18
CPCH01L31/1804Y02P70/50
Inventor 程平朱露张凯胜姚伟忠孙铁囤
Owner EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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