Polishing process used for passivating surface defects of CsI (TI) crystals
A crystal surface and crystal technology, applied in the field of scintillation crystal surface post-treatment process, can solve the problems affecting the radiation damage resistance, light absorption characteristics/luminescence characteristics, surface scratch damage, etc., to improve the radiation damage resistance, Passivation surface scratches, efficient and stable removal effect
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[0031] The present invention will be further described below in conjunction with description accompanying drawing and specific preferred embodiment, but does not therefore limit protection scope of the present invention.
[0032] The atmospheric low-temperature plasma gas passivation polisher for CsI (TI) crystal surface defects provided by the present embodiment comprises the steps:
[0033] Step 1, cleaning the surface of the CsI(TI) crystal by soaking the CsI(TI) crystal in acetone.
[0034] Step 2, using filtered clean nitrogen to dry the CsI(TI) crystals cleaned in Step 1.
[0035] Step 3, put the CsI(TI) crystal dried by step 2 into the reaction chamber of the plasma processing equipment. The plasma source provided by the plasma processing equipment is a capacitively coupled radio frequency plasma source, and the torch structure is a coaxial electrode torch structure. The basic structure includes: RF high-frequency generator (13.56MHz, 1.2-1.5kw), internal and external...
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