Vacuum electron beam coating method
A vacuum electron beam and electron beam technology, which is applied in vacuum evaporation plating, ion implantation plating, sputtering plating, etc., can solve the problems of difficult explosive welding quality and difficult compounding of titanium steel, and achieve good film performance and coating The effect of large thickness and low cost
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Embodiment 1
[0046] In the vacuum electron beam coating device of this embodiment: the electron beam furnace contains 2 working chambers, and each working chamber is provided with 2 electron guns;
[0047] A vacuum working chamber is placed in front of the working chamber in the vacuum electron beam coating device, and the vacuum chamber is equipped with an etching device and preheated at the same time;
[0048] Three vacuum chambers are placed in front of the working chamber in the vacuum electron beam coating device, and each vacuum chamber is equipped with a flat vacuum device for multi-stage vacuum;
[0049] Three vacuum chambers are installed behind the working chamber in the vacuum electron beam coating device, and each vacuum chamber is equipped with a flat vacuum water cooling device for multi-stage cooling;
[0050] The method for vacuum electron beam coating of the present embodiment comprises the following steps:
[0051] Put the TA1 pure titanium plate into the electron beam f...
Embodiment 2
[0053] In the vacuum electron beam coating device of this embodiment: the electron beam furnace contains 1 working chamber, and the working chamber is provided with 2 electron guns;
[0054] A vacuum working chamber is placed in front of the working chamber of the electron beam furnace, and the vacuum chamber is equipped with an etching device and preheated at the same time;
[0055] There are 4 more vacuum chambers in front of the working chamber in the vacuum electron beam coating device, and each vacuum chamber is equipped with a flat vacuum device for multi-stage vacuum;
[0056] Three vacuum chambers are installed behind the working chamber in the vacuum electron beam coating device, and each vacuum chamber is equipped with a flat vacuum water cooling device for multi-stage cooling;
[0057] The method for vacuum electron beam coating of the present embodiment comprises the following steps:
[0058] Put the TA0 pure titanium plate into the electron beam furnace, use the ...
Embodiment 3
[0060] In the vacuum electron beam coating device of this embodiment: the electron beam furnace contains 3 working chambers, and each working chamber is provided with 2 electron guns;
[0061] A vacuum chamber is placed in front of the working chamber in the vacuum electron beam coating device, and the vacuum chamber is equipped with an etching device and preheated at the same time;
[0062] 5 vacuum chambers are placed in front of the working chamber in the vacuum electron beam coating device, and each vacuum chamber is equipped with a flat vacuum device for multi-stage vacuum;
[0063] Three vacuum chambers are installed behind the working chamber in the vacuum electron beam coating device, and each vacuum chamber is equipped with a flat vacuum water cooling device for multi-stage cooling;
[0064] The method for vacuum electron beam coating of the present embodiment comprises the following steps:
[0065] Put the TA1 pure titanium plate into the electron beam furnace, use ...
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