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Applicable to the cleaning method of ceramic parts with surface attachments

A technology for attachments and parts, applied in the cleaning of ceramic parts with surface attachments, and in the field of cleaning of ceramic parts, which can solve problems such as bad

Active Publication Date: 2021-04-09
SHENZHEN SHISHANG ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In view of the above-mentioned shortcomings in the prior art that the attachments are ceramic parts, the effect of removing impurities on the surface of the workpiece is not good, the present invention provides a cleaning method suitable for surface attachments that are ceramic parts, which uses chemical soaking plus ultrasonic oscillation The combination of cleaning can easily and quickly remove impurities on the surface of the workpiece

Method used

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Embodiment Construction

[0026] This embodiment is a preferred implementation mode of the present invention, and other principles and basic structures that are the same or similar to this embodiment are within the protection scope of the present invention.

[0027] The present invention is mainly a cleaning method suitable for surface attachments of ceramic parts, the method comprising the following steps:

[0028] S1. Chemical cleaning: In this embodiment, ammonia water and hydrogen peroxide solution are used to soak the workpiece. When soaking, the hydrogen peroxide solution has not passed the workpiece. The volume ratio of hydrogen peroxide solution is H 2 o 2 :H 2 O: NH 4 OH=(2.5-3.5): (3.5-4.5): (0.5-1.5) prepared, preferably, H 2 o 2 :H 2 O: NH 4 OH=3:4:1, in this example, the water used is ultrapure water with a resistivity greater than or equal to 12MΩ·CM, the immersion temperature is 45°C±5°C, and the reaction time is 3-5 hours, until the workpiece is visually inspected Until there is...

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Abstract

The invention discloses a cleaning method suitable for surface attachments that are ceramic parts. The method includes the following steps: S1. Chemical cleaning: use ammonia water and hydrogen peroxide solution to soak the workpiece, and the volume ratio of the ammonia water and hydrogen peroxide solution is H 2 o 2 :H 2 O: NH 4 OH=(2.5-3.5): (3.5-4.5): (0.5-1.5) prepared; S2, rinse with pure water; S3, use nitric acid for neutralization reaction, the nitric acid used is nitric acid and hydrofluoric acid It is formed by mixing acid, when mixing, the volume ratio of each solution is HNO 3 :HF:H 2 O=(17~23):(0.5~1.5):(17~23); S4, scrubbing; S5, soak the workpiece in DI Water at room temperature for more than 10 minutes; S6, test the pH of the surface of the workpiece; S7, ultrasonic vibration cleaning ; S8, pH test on the workpiece surface; S9, CDA drying; S10, ultrasonic vibration cleaning; S11, heating and drying; S12, natural cooling.

Description

technical field [0001] The invention discloses a cleaning method for ceramic parts, in particular a cleaning method suitable for surface attachments of ceramic parts, and belongs to the technical field of special cleaning. Background technique [0002] Insulator Ring of AMAT eMax CT+ parts, Ceramic Lid, Gas Injector, Ion Port, and Screw Cover Ring of AMAT DPS parts, etc., all of which are made of ceramics as surface attachments. After long-term use, the surface of the workpiece will inevitably adhere Some impurities, so regular cleaning has become an indispensable work for this kind of workpiece. The body of this kind of workpiece is ceramic, and the surface is metal attachment (aluminum / photoresist), which cannot be removed well by conventional surface cleaning methods. Impurities on the surface of the workpiece, the cleaning effect is not good. Contents of the invention [0003] In view of the above-mentioned shortcomings in the prior art that the attachments are cerami...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/08B08B3/12B08B3/02B08B1/00B08B13/00
CPCB08B3/02B08B3/08B08B3/12B08B13/00B08B1/143
Inventor 熊志红张远
Owner SHENZHEN SHISHANG ELECTRONICS TECH
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