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Etching device and etching method of artificial quartz crystal seed wafer

A quartz crystal and chip corrosion technology, applied in crystal growth, chemical instruments and methods, single crystal growth, etc., can solve the problems of high corrosion intensity, fast corrosion speed, corrosion and perforation of seed wafers, etc., to improve accuracy and ensure cleanliness degree, the effect of ensuring uniformity

Active Publication Date: 2021-01-08
山东博达光电有限公司
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  • Description
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AI Technical Summary

Problems solved by technology

[0005] In the past, the traditional seed wafer etching process used hydrofluoric acid as the etching liquid, which was characterized by fast corrosion speed, high corrosion intensity, and easy corrosion and perforation of the seed wafer during the etching process. Therefore, it is necessary to improve the traditional etching process technology

Method used

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  • Etching device and etching method of artificial quartz crystal seed wafer
  • Etching device and etching method of artificial quartz crystal seed wafer
  • Etching device and etching method of artificial quartz crystal seed wafer

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Experimental program
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Embodiment 1

[0048] Embodiment 1, quartz crystal seed wafer corrosion control device, such as Figure 1-3 Shown; including seed wafer corrosion main frame 1, corrosion box 2, water bath box 3 and fixed ventilation pipe 4.

[0049] Seed wafer corrosion main body frame 1 is provided with seed wafer corrosion main machine operation timer 11 and the rotating shaft 12 of the seed wafer corrosion main machine with motor; The rotating shaft 12 is fixedly provided with telescopic draw bar 13; The rotating shaft 12 is horizontally arranged , the draw bar 13 is vertically arranged with the rotating shaft 12 . The motor can drive the rotating shaft 12 to rotate, and the rotating shaft 12 drives the drawbar 13 to rotate together.

[0050] The case cover (top) of the corrosion box 2 is provided with a traction through hole 21, a ventilation pipe hole 22 and a temperature measuring hole 23.

[0051] The corrosion box 2 is placed in the water bath box 3 directly below the rotating shaft 12 (draw bar 13...

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Abstract

The invention provides a corrosion device for an artificial quartz crystal seed chip. The corrosion device comprises a seed chip main body stander, a corrosion tank and a water-bath tank, wherein a timer and a rotating shaft with a motor are arranged on the seed chip main body stander, the timer is connected with the rotating shaft, and a traction rod is fixedly arranged on the rotating shaft; a rotating wheel capable of freely rotating is arranged on the traction rod, a traction line is fixedly arranged on the rotating wheel, a traction through hole and a venting pipe hole are formed in the top of the corrosion tank, the corrosion tank is placed in a water bath tank, and the traction line sequentially penetrates through a limiting hole and the traction through hole and is fixedly connected with a lifting rope. The invention further discloses a corrosion method for the artificial quartz crystal seed chip. The artificial quartz crystal seed chip can do a reciprocating motion in corrosion liquid. Temperature control of the corrosion liquid is emphasized, the supersaturation degree of the corrosion liquid is effectively controlled, and the uniform-speed corrosion is guaranteed by virtue of the concentration of the corrosion liquid.

Description

technical field [0001] The invention relates to an artificial quartz crystal seed wafer etching process, in particular to an etching device and an etching method for an artificial quartz crystal seed wafer. Background technique [0002] Artificial quartz crystal, also known as crystal, has excellent piezoelectric and optical properties. Quartz crystal components processed and manufactured using its piezoelectric properties, such as crystal resonators and crystal oscillators, are important components in the electronics industry. Prisms, lenses, polarizing devices, optical low-pass filters, heat sinks, etc. processed and manufactured using its optical properties have been obtained in digital cameras, digital cameras, projectors, optical fiber communications, laser components, and intelligent information electronics products. widely used. For example, digital cameras and digital video cameras, electronic surveillance cameras, optical low-pass filters 0LPF in CCD devices used i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B7/10C30B29/18C30B33/10
CPCC30B7/10C30B29/18C30B33/10
Inventor 刘德辉易际让
Owner 山东博达光电有限公司
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