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Design and processing method of a rectangular micro-cantilever beam probe applied to nanoscale single-point contact ultra-low friction coefficient measurement

A micro-cantilever beam and ultra-low friction technology, which is applied in the direction of measuring devices, scanning probe technology, scanning probe microscopy, etc., can solve the problem of unconcerned ultra-low friction coefficient measurement, which cannot be measured, and has not yet realized the friction coefficient measurement And other issues

Active Publication Date: 2021-02-19
SOUTHWEST JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, at present, the measurement of ultra-low friction coefficient under the state of nanoscale single-point contact is a recognized technical problem, which is mainly reflected in the following two aspects: first, nanoscale single-point contact is usually realized by atomic force microscope, and atomic force microscope is mainly used in Surface topography scanning, mechanical performance testing, etc. have basically not paid attention to the measurement of ultra-low friction coefficient; secondly, the resolution of friction coefficient reported in the literature is usually on the order of 0.01, and the higher accuracy of 0.0001 and above (<0.0001) has not yet been achieved. ) resolution of the coefficient of friction measurement
When the friction coefficient resolution is further reduced to 0.0001 and above, the friction signal will be covered by system noise and cannot be measured

Method used

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  • Design and processing method of a rectangular micro-cantilever beam probe applied to nanoscale single-point contact ultra-low friction coefficient measurement
  • Design and processing method of a rectangular micro-cantilever beam probe applied to nanoscale single-point contact ultra-low friction coefficient measurement
  • Design and processing method of a rectangular micro-cantilever beam probe applied to nanoscale single-point contact ultra-low friction coefficient measurement

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Experimental program
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Embodiment 1

[0060] Design and process rectangular micro-cantilever beam probes according to the following ultra-low friction coefficient measurement requirements: 1) Realize ultra-low friction coefficient measurement with a resolution of 0.0001 and above; 2) The maximum positive pressure that can be loaded is equal to or close to 2.5μN; 3 ) The micro-cantilever material is silicon nitride; 4) The tip is a graphene ball with a diameter of 8 μm; 5) An MFP-3D atomic force microscope is used for the experiment.

[0061] The characteristics of the MFP-3D atomic force microscope in this embodiment are as follows: 1) The laser spot size is on the order of microns. In order to make the laser spot fall completely on the reflective surface of the rectangular micro-cantilever beam, the width w of the beam should not be less than 20 μm, and the length l should not be less than 50μm; 2) The thickness t of the silicon nitride micro-cantilever beam is usually 0.2μm-0.6μm; 3) After measurement, the recipr...

Embodiment 2

[0103] To further carry out microscopic friction experiments, use the rectangular micro-cantilever beam probe made in Example 1 to rub against highly oriented pyrolytic graphite. The friction ring test results are as follows Figure 6 As shown, under 1.70μN positive pressure (the resolution of friction coefficient at this time is 5×10 -5 ) under the friction force is 10.0nN, the friction coefficient is 0.00591.

[0104] Therefore, the rectangular micro-cantilever beam probe manufactured according to the design and processing method proposed by the present invention can be applied to the measurement of the nanoscale single-point contact ultra-low friction coefficient of the sample in a super-slip state.

[0105] A design and processing method of a rectangular micro-cantilever beam probe applied to nanoscale single-point contact ultra-low friction coefficient measurement according to the present invention significantly improves the measurement resolution of friction coefficient ...

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Abstract

The invention provides a design and processing method of a rectangular micro-cantilever beam probe applied to the measurement of nano-scale single-point contact ultra-low friction coefficient. First, a universal friction coefficient measurement theoretical model is established; combined with the rectangular micro-cantilever probe Based on the structural characteristics of the needle, establish a theoretical model for the measurement of the friction coefficient of the rectangular micro-cantilever probe; on this basis, combine the resolution of the friction coefficient, the maximum normal pressure that can be loaded or the minimum friction that can be measured, and the characteristics of the atomic force microscope, etc. Constraint conditions, design a rectangular micro-cantilever probe that meets the measurement requirements; finally process the rectangular micro-cantilever probe according to the design size. The probe designed and processed by the method proposed by the present invention can significantly improve the measurement resolution of the friction coefficient, realize ultra-low friction coefficient measurement with a resolution of 0.0001 and above, and ensure the authenticity and reliability of the quantitative analysis of the super-slip process. It provides an important measurement method for in-depth and systematic research on superslip theory and technology.

Description

technical field [0001] The invention belongs to the technical field of analysis and measurement control in instrumentation technology, and in particular relates to a design and processing method of a rectangular micro-cantilever beam probe applied to the measurement of nanoscale single-point contact ultra-low friction coefficient. Background technique [0002] Friction is a common physical phenomenon in the material world, and it is closely related to human life and production. All equipment moving parts involve friction, wear and lubrication. With the rapid growth of the world economy, the losses caused by friction and wear in various industries have also increased accordingly, and the energy crisis has become increasingly severe. According to foreign statistics, friction consumes 30% of the world's primary energy, and about 80% of machine parts fail due to wear and tear. According to incomplete statistics, the economic loss caused by friction and wear in my country reach...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/26G01Q60/38
CPCG01Q60/26G01Q60/38
Inventor 江亮钱林茂李斌郭丹雒建斌林斌
Owner SOUTHWEST JIAOTONG UNIV