Design and processing method of a rectangular micro-cantilever beam probe applied to nanoscale single-point contact ultra-low friction coefficient measurement
A micro-cantilever beam and ultra-low friction technology, which is applied in the direction of measuring devices, scanning probe technology, scanning probe microscopy, etc., can solve the problem of unconcerned ultra-low friction coefficient measurement, which cannot be measured, and has not yet realized the friction coefficient measurement And other issues
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Embodiment 1
[0060] Design and process rectangular micro-cantilever beam probes according to the following ultra-low friction coefficient measurement requirements: 1) Realize ultra-low friction coefficient measurement with a resolution of 0.0001 and above; 2) The maximum positive pressure that can be loaded is equal to or close to 2.5μN; 3 ) The micro-cantilever material is silicon nitride; 4) The tip is a graphene ball with a diameter of 8 μm; 5) An MFP-3D atomic force microscope is used for the experiment.
[0061] The characteristics of the MFP-3D atomic force microscope in this embodiment are as follows: 1) The laser spot size is on the order of microns. In order to make the laser spot fall completely on the reflective surface of the rectangular micro-cantilever beam, the width w of the beam should not be less than 20 μm, and the length l should not be less than 50μm; 2) The thickness t of the silicon nitride micro-cantilever beam is usually 0.2μm-0.6μm; 3) After measurement, the recipr...
Embodiment 2
[0103] To further carry out microscopic friction experiments, use the rectangular micro-cantilever beam probe made in Example 1 to rub against highly oriented pyrolytic graphite. The friction ring test results are as follows Figure 6 As shown, under 1.70μN positive pressure (the resolution of friction coefficient at this time is 5×10 -5 ) under the friction force is 10.0nN, the friction coefficient is 0.00591.
[0104] Therefore, the rectangular micro-cantilever beam probe manufactured according to the design and processing method proposed by the present invention can be applied to the measurement of the nanoscale single-point contact ultra-low friction coefficient of the sample in a super-slip state.
[0105] A design and processing method of a rectangular micro-cantilever beam probe applied to nanoscale single-point contact ultra-low friction coefficient measurement according to the present invention significantly improves the measurement resolution of friction coefficient ...
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