Post-posed splitting pupil laser differential confocal microscopic detection method and device

A differential confocal and microscopic detection technology, applied in the direction of measuring devices, analytical materials, material excitation analysis, etc., can solve the problems of limited measurement accuracy, light source intensity fluctuations, poor confocal intensity response sensitivity, and decreased spatial resolution. , to achieve the effects of measuring range and resolution, simplifying the detection optical system, and improving resolution

Pending Publication Date: 2019-03-26
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

However, the existing confocal sensors have the following disadvantages: when the confocal intensity response hypotenuse is used for measurement, absolute displacement measurement cannot be achieved, and the measurement accuracy is limited by the nonlinearity of the confocal intensity response curve hypotenuse measurement interval and light source intensity fluctuations , measured surface scattering and reflection characteristics and other factors; when using focus tracking measurement, because the focus of the confocal sensor corresponds to the vertex with the worst confocal intensity response sensitivity, which restricts the further improvement of the focus tracking accuracy of this type of confocal sensor
[0005] For this reason, the present invention proposes a post-splitting pupil laser differential confocal microscopic detection method with non-inclined beam incidence to overcome the deficiency of spatial resolution reduction caused by the joint use of the split pupil laser differential confocal imaging system and the excitation scattering spectroscopy system Wait

Method used

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  • Post-posed splitting pupil laser differential confocal microscopic detection method and device
  • Post-posed splitting pupil laser differential confocal microscopic detection method and device
  • Post-posed splitting pupil laser differential confocal microscopic detection method and device

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Embodiment 1

[0048] Such as image 3 As shown, the rear collecting pupil 8 is placed on the pupil plane of the first converging lens 7, and the excitation beam emitted by the light source system 1 passes through the dichroic prism 2 and the measuring objective lens 3, then converges on the measured sample 4, and is reflected out of the carrier. The reflected light with the geometric shape information of the sample enters the rear split-pupil laser differential confocal detection system 6, passes through the first converging lens 7 and the rear collection pupil 8, and is focused by the light intensity acquisition system 10 Segmented detection to realize the detection of the geometric shape of the 4 micro-areas of the tested sample.

[0049] In particular, the rear collection pupil 8 can be replaced by other shapes, such as a circle, to form a rear circular split pupil laser differential confocal microscopic detection method, such as Figure 4 shown.

[0050] In particular, by adding a rad...

Embodiment 2

[0057] Such as Figure 11 As shown, the rear split pupil laser differential confocal microscope detection device includes a light source system 1 for generating an excitation beam, a beam modulation system 20, a radial polarization conversion system 18, a beam splitter prism 2, a pupil filter 19, a measuring objective lens 3, and a Test sample 4, three-dimensional scanning system 5, rear split pupil laser differential confocal detection system 6.

[0058] Above, along the laser emission direction of the light source system 1, the second converging lens 19, the second pinhole 20, the third converging lens 21, the radial polarization conversion system 16, the dichroic prism 2, the pupil filter 17, and the measuring objective lens are sequentially placed 3. The sample to be tested 4 and the three-dimensional scanning system 5 place the first converging lens 7, the rear collection pupil 8, the relay magnifier 22, and the CCD detector 25 in sequence in the reflection direction of t...

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Abstract

The invention relates to a post-posed splitting pupil laser differential confocal microscopic detection method and device and belongs to the technical field of surface fine structure measurement. Themethod comprises the following steps: a tested sample is scanned and measured by adopting light path arrangement of post-posed splitting pupil laser differential confocal microscopy; an incident beampenetrating a measuring objective lens to be focused to the surface of the tested sample; reflective light loaded with geometrical morphology information of the tested sample is collected through themeasuring objective lens to enter a post-posed splitting pupil laser differential confocal defecting system; the reflective light is focused to a detecting surface through a first focusing lens and acollecting light pupil; two areas are arranged on the detecting focal face off-axis; response of the two areas is measured and a response characteristic equation of the detector is obtained; and surface shape of the tested sample is re-constructed according to the intensity size of the curve in a linear region or the position of the curve, the intensity of which is zero. The method is simple in structure, can consider the spatial resolving power and the range ability of the system effectively, and achieves optical high resolution absolute measurement of surface topography of an object, a three-dimensional fine structure and the like.

Description

technical field [0001] The invention relates to a method and device for post-splitting pupil laser differential confocal microscopic detection, in particular to a post-splitting pupil laser differential confocal microscanning detection method with high axial resolution for segmented Airy disk area detection, which belongs to microscopic measurement In the technical field, it particularly provides a method for high-resolution measurement that can be used to detect surface three-dimensional microstructure, micro-steps, integrated circuit line width, and micro-region surface topography. Background technique [0002] Confocal microscopy technology has been widely used in the field of high-resolution measurement due to its unique three-dimensional tomographic imaging capabilities and high-resolution detection capabilities. precision measurement; Zhi Li et al. proposed a transverse scanning confocal microscopy technique for online displacement measurement of MEMS devices; Ganesha ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/63G01N21/01
Inventor 赵维谦李荣吉邱丽荣王允
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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