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Reflection electrode and al alloy sputtering target

A reflective electrode and sputtering target technology, which is applied in sputtering coating, circuit, electric light source, etc., can solve the problem that the driving voltage of the component cannot be fully reduced, and achieve the effect of reducing the driving voltage and high reflectivity

Active Publication Date: 2019-04-16
KOBE STEEL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, in the method described in Patent Document 1, since a tungsten film and a molybdenum film having high resistivity are interposed between the Al reflective film and the transparent conductive film, the driving voltage of the entire device cannot be sufficiently reduced.

Method used

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  • Reflection electrode and al alloy sputtering target
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Embodiment Construction

[0021] Hereinafter, in the embodiments of the invention, the present invention will be described in detail. In addition, the following "atom %" and "at atom %" are synonymous.

[0022]

[0023] (Zn content)

[0024] The Al alloy constituting the reflective film of the reflective electrode contains Zn in a range of 3 atomic % to 12 atomic %. If it is less than 3 atomic %, the effect of improving the electrical connection with a transparent conductive film such as ITO is insufficient, and there is no effect of improving the driving voltage of devices such as organic EL displays and organic EL lighting having the reflective electrode. When it is higher than 12 atomic %, the reflectivity decreases, and the resistivity of the Al alloy increases, and as a result, the resistivity of the reflective film, that is, the reflective electrode increases, and the organic EL display and organic EL lighting with the reflective electrode increase. The driving voltage of the element will ris...

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Abstract

The purpose of the present invention is to provide, to an element such as an organic EL display or an organic EL illumination, a reflection electrode having a high reflectivity while a driving voltagetherefor is sufficiently reduced. The present invention pertains to a reflection electrode which is formed of a transparent conductive film and a reflection film made of an Al alloy and which is characterized in that: a main surface of the reflection film is in contact with a main surface of the transparent conductive film; and the Al alloy contains Zn and a rare earth element such that the ratioof Zn is 3-12 atom% and the ratio of the rare earth element is 0.01-0.5 atom%.

Description

technical field [0001] The present invention relates to a reflective electrode used for components such as organic EL display and organic EL lighting, and an Al alloy sputtering target for forming a reflective film of the reflective electrode. Background technique [0002] Organic EL displays and organic EL lighting are devices that utilize the electroluminescence phenomenon of organic materials, and there is a demand for these devices to improve the light extraction efficiency of the device and reduce power consumption. [0003] In devices such as top-emission organic EL displays that extract light from the direction opposite to the substrate, an organic material is laminated on the reflective electrode. In order to reflect the light generated by the organic material on the substrate side and improve the extraction efficiency, a material with high light reflectivity is suitable for the reflective electrode, and Ag and Al with high reflectivity in the visible wavelength regi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B33/26C23C14/06C23C14/14C23C14/34H01L51/50H05B33/10
CPCC23C14/06C23C14/14C23C14/34H05B33/10H05B33/26H10K59/80518C23C14/185C23C14/3414H01B1/023
Inventor 田内裕基日野绫
Owner KOBE STEEL LTD