A silicon tetrafluoride rectification device and its production method

Abstract

The invention relates to a silicon tetrafluoride rectifying device. The device comprises a raw material storage tank for storing crude silicon tetrafluoride raw materials, a compressor, a first heat exchanger, a second heat exchanger, a light removal tower, a heavy removal tower and a finished product buffer tank; the raw material storage tank is connected with the input end of the compressor through a raw material conveying pipe; the output end of the compressor is connected with the input end of the first heat exchanger through a compression conveying pipe; the output end of the first heat exchanger is connected with the input end of the second heat exchanger through a first heat exchange conveying pipe; the output end of the second heat exchanger is connected with the side wall of the light removal tower through a second heat exchange conveying pipe; the bottom of the light removal tower is connected with the side wall of the heavy removal tower through a connecting conveying pipe;the top of the heavy removal tower is connected with a finished product buffer tank through a discharging pipe; a light removal condenser is arranged at the upper part of the interior of the light removal tower; a heavy removal condenser is arranged at the upper part of the interior of the light removal tower; and an exhaust pipe is connected to the top of the light removal tower. The invention provides the silicon tetrafluoride rectifying device with high rectification purity, good impurity removal effect and high raw material utilization rate and a production method by the rectifying device.

Description

technical field [0001] The invention relates to a silicon tetrafluoride rectification device and a production method thereof. Background technique [0002] At present, microelectronics technology is the main cornerstone of modern information technology and military technology, and one of the key factors to promote scientific and technological progress, industrial development, economic take-off and social advancement. Integrated circuit is the core of microelectronics technology, and its development level and industrial scale have become an important symbol to measure a country's economic strength. Electronic specialty gases (such as silicon tetrafluoride), especially high-purity electronic gases as a new category of electronic chemical materials, are important factors restricting the reliability and yield of integrated circuits. With the rapid development of electronic information technology, the degree of integration is getting higher and higher, and the purity requirement...

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Problems solved by technology

However, there are only a few countries capable of producing high-purity electronic gases above 5N, and high-purity gases are widely used in electronic products, aerospace, high-efficiency solar cells, and military industries. The preparation technology of silicon tetrafluoride is not yet perfect. The method is complex and difficult to master, and the products produced cannot fully meet the needs of related electronic products. The quality is poor and there are many problems, and it can only be used to manufacture low-standard products. This situation seriously restricts the development of electronic technology

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