Chemical vapor deposition preparation method for sapphire optical fiber BN total reflection coating
A chemical vapor deposition and sapphire technology, which is applied in the field of chemical vapor deposition preparation of sapphire optical fiber BN total reflection coating, can solve the problem of difficult control of sol solution concentration, viscosity and pulling speed, inability to guarantee film quality, cladding quality influence, etc. problem, to achieve the effect of protecting sapphire fiber, strong design and good uniformity
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Embodiment 1
[0041] Step 1: ultrasonically clean the sapphire optical fiber sample in acetone, alcohol, and distilled water for 10 minutes respectively, and then dry it at room temperature.
[0042] Step 2: Arrange the dried optical fiber neatly overhead into a graphite frame of 150mm×100mm×60mm, and hang the graphite frame at the center of the isothermal zone in the deposition furnace;
[0043] Step 3: Vacuum the deposition furnace, and at the same time feed argon gas with a flow rate of 50-150ml / min, pump the hearth of the deposition furnace to the set vacuum degree of 0.5Pa, and then raise the temperature to the set temperature of 650°C;
[0044] Step 4: After the temperature stabilizes, introduce carrier gas H 2, the flow rate is 50~150ml / min; the gas source is BCl 3 and NH 3 , BCl 3 The gas flow rate is 50~100ml / min, NH 3 The gas flow rate is 50-100ml / min; the deposition time is 15h, and the atmosphere is BCl 3 -NH 3 -H 2 , get BN coating;
[0045] Step 5: After the deposition...
Embodiment 2
[0048] Step 1: ultrasonically clean the sapphire optical fiber sample in acetone, alcohol, and distilled water for 10 minutes respectively, and then dry it at room temperature.
[0049] Step 2: Arrange the dried optical fiber neatly overhead into a graphite frame of 150mm×100mm×60mm, and hang the graphite frame at the center of the isothermal zone in the deposition furnace;
[0050] Step 3: Vacuum the deposition furnace, and at the same time feed argon gas with a flow rate of 50-150ml / min, pump the hearth of the deposition furnace to the set vacuum degree of 0.5Pa, and then raise the temperature to the set temperature of 650°C;
[0051] Step 4: After the temperature stabilizes, introduce carrier gas H 2 , the flow rate is 50~150ml / min; the gas source is BCl 3 and NH 3 , BCl 3 The gas flow rate is 50~100ml / min, NH 3 The gas flow rate is 50-100ml / min; the deposition time is 30h, and the atmosphere is BCl 3 -NH 3 -H 2 , get BN coating;
[0052] Step 5: After the depositio...
Embodiment 3
[0055] Step 1: ultrasonically clean the sapphire optical fiber sample in acetone, alcohol, and distilled water for 10 minutes respectively, and then dry it at room temperature.
[0056] Step 2: Arrange the dried optical fiber neatly overhead into a graphite frame of 150mm×100mm×60mm, and hang the graphite frame at the center of the isothermal zone in the deposition furnace;
[0057] Step 3: Vacuum the deposition furnace, and at the same time feed argon gas with a flow rate of 50-150ml / min, pump the hearth of the deposition furnace to the set vacuum degree of 0.5Pa, and then raise the temperature to the set temperature of 650°C;
[0058] Step 4: After the temperature stabilizes, introduce carrier gas H 2 , the flow rate is 50~150ml / min; the gas source is BCl 3 and NH 3 , BCl 3 The gas flow rate is 50~100ml / min, NH 3 The gas flow rate is 50-100ml / min; the deposition time is 45h, and the atmosphere is BCl 3 -NH 3 -H 2 , get BN coating;
[0059] Step 5: After the depositio...
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