Detector adopting acoustic resonator and carbon nanotube and manufacturing method thereof

Abstract

The invention discloses a detector adopting an acoustic resonator and a carbon nanotube and a manufacturing method thereof. The detector comprises the acoustic resonator. The acoustic resonator comprises a substrate. One side of the acoustic resonator, which is far away from the substrate, is provided with the carbon nanotube. The manufacturing method is characterized by growing the carbon nanotube on the side of the acoustic resonator which is far away from the substrate. The detector has advantages that the response time of the detector is short; sensitivity is high; a work frequency is high; and the detector has an application prospect in a wireless communication field.

Description

technical field [0001] The invention relates to the field of semiconductor devices and manufacturing, in particular to a detector using an acoustic wave resonator and carbon nanotubes and a manufacturing method thereof. Background technique [0002] In recent decades, photodetectors have developed rapidly and have been widely used in military, industrial and agricultural production, medical and health fields, and in daily life. With the continuous emergence of new materials, new structures, and new processes, its application fields are also expanding. Among them, the photothermal detector responds to infrared radiation of various wavelengths, and is a non-selective detector. Compared with typical photon detectors, photothermal detectors can work at room temperature and do not require a refrigerator, so the cost is lower and the system is simpler and more compact. [0003] The typical thermal time constant of photothermal detectors is on the order of milliseconds, which is ...

AI Technical Summary

Problems solved by technology

At this stage, due to the preparation of thermal detector materials and the improvement of device structure design and manufacturing process, the thermal conductance can have a large range of variation, but the sensitivity of thermal detectors still needs to be sacrificed at the expense of time response.

[0004] The output signal of traditional detectors is usually small, so a preamplifier is required, which introduces noise

Amplifier noise ultimately limits the high frequency performance of thermal detectors and is most likely the factor limiting performance of uncooled bolometers

In recent years, a series of low-noise level FETs suitable for low-impedance sources and high-impedance sources have appeared. Even so, there are still cases where amplifier noise is the main noise source, and thermal detectors have limited performance at high frequencies. The problem has not been solved, which limits its application in wireless communication

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