Method for multi-cavity continuous production of metal compound nano-powder by hot arc evaporation

A metal compound and nano-powder technology, which is applied in the direction of using atmospheric pressure to change substances chemically, chemical instruments and methods, chemical/physical processes, etc., can solve problems such as insufficient continuity, low production efficiency, and large energy consumption , to achieve the effect of reducing the time of vacuuming, avoiding large-scale production stoppage and improving production efficiency

Inactive Publication Date: 2019-05-07
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] At present, in the single-chamber powder preparation equipment and process, most of the time is spent on vacuuming and vacuum maintenance during the cycle of vacuum extraction, powder generation and processing, and vacuum maintenance. It takes 3-4 hours for the equipment to be vacuumed, and the time for powder preparation is less than 0.5 hours. The time for vacuum extraction and vacuum maintenance accounts for 50%-70%, while the actual powder production time is 15-20%. In other words, the production efficiency is low. At the same time, due to the vacuum extraction and vacuum maintenance and repeated repetition of this process, a large amount of energy will be consumed, which will greatly increase the cost.
[0006] 2. Low purity and cross-contamination
[0007] For the single-chamber powder preparation equipment and process, after the nano-powder preparation of one material is prepared, if the powder of other materials is prepared, there will be powder residues in copper crucibles, equipment connections and other places that cannot be removed, resulting in When preparing the next powder, there is at least two kinds of mutual contamination between the powders, thereby reducing the purity of the nano-powders
[0008] 3. Unable to realize continuous production in the true sense
[0009] The current single-chamber powder preparation equipment and process are limited by the size of the anode material, and there will be insufficient continuity in the continuous feeding and supply process of the material
At the same time, since the powder collection process requires repeated vacuuming and vacuuming processes, the operation time is relatively high. This method cannot achieve continuous production on the premise of ensuring product quality in large-scale industrial production. In the near future phase out

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] The continuous production method of multi-cavity metal compound nano powder by thermal arc evaporation includes the following steps:

[0045] (1) Placing targets: install single metal targets of the same composition as anodes on anode holders in different independent cavities, and use metal with a melting point higher than 3000°C as cathode, and the metal is tungsten;

[0046] (2) Vacuum: close the hatch, open the vacuum valve of each independent cavity, and vacuum all the cavities until the vacuum degree is not higher than 10 -4 Pa, close the vacuum valve of each independent cavity;

[0047] (3) Arc starting: Open the inlet valve of each independent cavity, pass in 0.1 atm working gas hydrogen and 0.2 atm reaction gas, and pass 50V DC voltage between the cathode and anode to start the arc. The anode starts to melt and evaporate into an atomic state, and the reaction gas is cracked into an atomic state under the action of an electric arc; the reaction gas is oxygen to obtain a...

Embodiment 2

[0054] The continuous production method of multi-cavity metal compound nano powder by thermal arc evaporation includes the following steps:

[0055] (1) Placing targets: install metal alloy targets with different compositions on anode holders in different independent cavities as anodes, and use metals with a melting point higher than 3000°C as cathodes, and the metal is platinum;

[0056] (2) Vacuum: close the hatch, open the vacuum valve of each independent cavity, and vacuum all the cavities until the vacuum degree is not higher than 10 -4 Pa, close the vacuum valve of each independent cavity;

[0057] (3) Arc starting: Open the inlet valve of each independent cavity, and pass in 0.15 atm working gas hydrogen and 0.25 atm reaction gas, and 115V DC voltage is passed between the cathode and the anode to start the arc. The anode begins to melt and evaporate into an atomic state, and the reaction gas is cracked into an atomic state under the action of an electric arc; the reaction gas ...

Embodiment 3

[0064] The continuous production method of multi-cavity metal compound nano powder by thermal arc evaporation includes the following steps:

[0065] (1) Place the target material: install the metal alloy target material of the same composition as the anode on the anode holders of different independent cavities, and use the metal with the melting point higher than 3000℃ as the cathode, and the metal is molybdenum;

[0066] (2) Vacuum: close the hatch, open the vacuum valve of each independent cavity, and vacuum all the cavities until the vacuum degree is not higher than 10 -4 Pa, close the vacuum valve of each independent cavity;

[0067] (3) Arc starting: Open the inlet valve of each independent cavity, and pass in 0.2 atm working gas hydrogen and 0.3 atm reaction gas, and 180V DC voltage is passed between the cathode and anode to start the arc. The anode starts to melt and evaporate into an atomic state, and the reaction gas is cracked into an atomic state under the action of an ele...

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PUM

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Abstract

The invention relates to the technical field of nano-powder production, in particular to a method for multi-cavity continuous production of metal compound nano-powder by hot arc evaporation. Specifically, monometallic or metal alloy target materials with the same or different compositions are installed on the anode fixators of all independent chambers as the anode, a metal with a melting point higher than 3000DEG C is adopted as the cathode, vacuum pumping and arc striking are carried out, also the direct current power is controlled to change the anode evaporation efficiency, and the temperature gradient in the cavities is controlled to form metal compound nano-powder with different particle sizes. The method provided by the invention greatly improves the production efficiency and lowers the cost, realizes the simultaneous preparation and continuous production of powder with different compositions, avoids mutual contamination in the powder preparation process, and improves the powder purity.

Description

Technical field [0001] The invention relates to the technical field of nano powder production, in particular to a continuous production method of metal compound nano powder. Background technique [0002] DC arc plasma is an effective heat source for preparing nanoparticles, especially "core / shell" metal (alloy) nanocomposite particles, carbon-related materials and ceramic nanomaterials. At present, this method has initially achieved mass production, such as Chinese patent application: A multi-source DC arc automatic nano powder production system and method (201410189518.4), but for large-scale industrial production, there are still many technical problems, mainly in how high efficiency, low cost, high purity and no Pollution and continuous preparation of nano powders. [0003] The existing metal compound nano-powder preparation equipment and processes are mainly aimed at the generation, classification, trapping and processing of nano-powders in a single cavity, that is, a single g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J19/08B01J3/00B01J19/00
Inventor 黄昊黄子岸吴爱民
Owner DALIAN UNIV OF TECH
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