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Selenium drum preparation method combining high-power pulse magnetron sputtering technology

A high-power pulse, magnetron sputtering technology, applied in the direction of sputtering plating, ion implantation plating, metal material coating technology, etc., can solve the problems of low deposition rate, limit popularization and application, restrict development, etc., and achieve deposition Effects of rate increase, plasma density increase, and interface performance improvement

Pending Publication Date: 2019-05-10
深圳戴尔蒙德科技有限公司
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AI Technical Summary

Problems solved by technology

However, from the perspective of industrial technology application, the disadvantage of this technology is that the deposition rate is too low, which may be the main reason restricting the development of this technology.
In addition, although the ionization rate of this technology is higher than that of conventional DC magnetron sputtering, for some metal targets with low sputtering rates, the particle ionization rate of the system needs to be further improved, which is also a limitation. The key to the popularization and application of this technology

Method used

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  • Selenium drum preparation method combining high-power pulse magnetron sputtering technology
  • Selenium drum preparation method combining high-power pulse magnetron sputtering technology

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Embodiment Construction

[0028] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0029] Such as figure 1 and figure 2 Shown, the specific embodiment of the present invention comprises substrate, and interconnected vacuum system, high-power pulse magnetron sputtering system, vacuum cathodic arc deposition system and control system, substrate passes high-power pulse magnetron sputtering system and vacuum The cathode arc deposition system is combined to prepare toner cartridges;

[0030] A method for preparing a toner cartridge combined with high-power pulsed magnetron sputtering technology, the method steps are as follows:

[0031] S01. Use heavy metal and gas mixed plasma to clean the surface of the substrate alternately with high and low energy;

[0032] S02. Utilize the high-power pulsed magnetron sputtering system (HIPIMS) to carry out secondary cleaning to the substrate;

[0033] S03. Vacuum cathodic arc deposition system (FCVA) u...

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Abstract

The invention relates to a selenium drum preparation method combining a high-power pulse magnetron sputtering technology. A base body, a vacuum system, a high-power pulse magnetron sputtering system,a vacuum cathode-arc deposition system and a control system are included, wherein the vacuum system, the high-power pulse magnetron sputtering system, the vacuum cathode-arc deposition system and thecontrol system are connected with one another, and the base body is combined with the vacuum cathode-arc deposition system through the high-power pulse magnetron sputtering system to prepare a selenium drum. The high-power pulse magnetron sputtering is combined with the vacuum cathode-arc deposition system, so that electric potential distribution between the plasma regions is changed, and the plasma density is improved, and the problem that the HIPIMS deposition rate is low is solved to a certain extent. Meanwhile, the combination condition of membrane base interfaces is effectively improved,the compactness of membrane layers is good, the color of the prepared membranes is adjustable according to the component of the membranes, and the deposition rate is increased; and the use performanceis excellent, the interface performance can be improved, and the tribological property of the membranes can be improved.

Description

technical field [0001] The invention relates to the technical field of toner cartridge preparation, and more specifically refers to a method for preparing a toner cartridge combined with high-power pulse magnetron sputtering technology. Background technique [0002] With various office equipment becoming an indispensable auxiliary tool in people's work and life, the high-frequency use of laser printers, one of the main peripherals of computers, also makes the consumption of matching printing consumables, such as drums, etc. The speed of more than 30% is increasing. Producing a new drum needs to consume a lot of petroleum and other resources, and the heavy metal elements and residual carbon powder in the waste drum will cause great harm to the environment if it enters the air, water, and soil. Therefore, improving the service life of the toner cartridge and reducing the consumption of the toner cartridge are of great significance both economically and environmentally. Accor...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/54
Inventor 廖斌庞盼唐杰罗军陈琳
Owner 深圳戴尔蒙德科技有限公司
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