High-temperature micro-pressure pressure sensor, and manufacturing method and measuring system thereof

Abstract

The invention discloses a high-temperature micro-pressure pressure sensor. The high-temperature micro-pressure pressure sensor comprises a sensor chip, a left side compensation circuit, a right side compensation circuit, a power supply electrode pair, a signal detection and extraction electrode pair, a bottom supporting layer, and a peripheral package; the sensor chip comprises overlapped from bottom to top, a silicon bottom layer, a silicon dioxide insulating layer, a silicon carbide top layer, and an uppermost cavity sealing layer; the bottom supporting layer is positioned at the bottom of the sensor chip, and an air vent hole is formed in the middle of the bottom supporting layer; and the peripheral package comprises a stainless steel bottom and a plastic outer casing, and the stainlesssteel bottom and the outer casing are combined to cover the sensor chip. On the basis of an MEMS technology, according to the structure of the high-temperature micro-pressure pressure sensor, sensitivity, linearity, and accuracy of the sensor under a high-temperature environment are greatly improved, high accuracy measurement of air pressure within 0 to 1 kPa under a high-temperature micro-pressure condition can be achieved. The invention further discloses a manufacturing method and a measuring system of the high-temperature micro-pressure pressure sensor.

Description

technical field [0001] The invention belongs to the technical field of micro-nano electromechanical system sensors, and in particular relates to a high-temperature micro-pressure pressure sensor, a manufacturing method thereof, and a measurement system. Background technique [0002] Scientific inventions and industrial production play an important role in the progress of society, the national economy, and the safety of people's lives and property. MEMS sensors are widely used due to their small size, high-precision batch manufacturing, and low energy consumption. With the development of science and technology, many scientific experiments and factory production processes need to be carried out in high-temperature and micro-pressure environments, but traditional pressure sensors cannot perform accurate barometric pressure measurements in high-temperature and micro-pressure environments. [0003] The principle of the traditional pressure sensor is to convert the pressure into t...

AI Technical Summary

Problems solved by technology

Nowadays, many scientific experiments and factory production processes need to be carried out in a high-temperature and micro-pressure environment, which requires high sensitivity, linearity and accuracy of sensor measurement. However, traditional piezoresistive pressure sensors have poor sensitivity in high-temperature environments. The disadvantages of low linearity, hysteresis and large repeatability error

Images