A method for rapid measurement of object surface steps by spectral confocal line scanning
A spectral confocal and object surface technology, which is applied in the field of spectral confocal line scanning to quickly measure the surface steps of objects, can solve problems such as limiting measurement speed, and achieve the effects of accelerating measurement speed, wide application range, and high measurement accuracy
Active Publication Date: 2020-04-28
XI AN JIAOTONG UNIV
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Problems solved by technology
The traditional measurement method based on this method is single-point measurement, and only the height information of a point on the sample surface can be extracted during measurement. The spectral confocal system needs to be equipped with an X-Y plane or a horizontal two-dimensional scanning system when measuring the overall surface topography of the object. Therefore, Limits the application of measurement speed and real-time measurement in industrial field
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[0039] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0040] see Figure 1 to Figure 3 , a kind of spectral confocal line scanning method provided by the present invention quickly measures the step of object surface, comprises the following steps:
[0041] 1) Build a spectral confocal line scanning device, which includes a composite light source 1, a collimating lens 2, a beam splitter 3, a dispersion focusing element 4, an achromatic focusing lens 6, an optical fiber 7 and a spectrometer 8; when in use, the composite light source The composite light emitted by 1 passes through the collimator lens 2, the beam splitter 3 and the dispersion focusing element 4 in sequence, and then converges on the step sample or the standard plane mirror 5, and the reflected light field passes through the dispersion focusing element 4, the beam splitter 3, and the achromatic focusing lens 6 and optical fiber 7, enter the spectrom...
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Abstract
The invention discloses a method for rapidly measuring object surface steps through spectrum confocal line scanning. The method comprises: a spectrum confocal line scanning device is built; a standardplane mirror is detected, the position of the standard plane mirror is moved in the axial direction, meanwhile, the coordinate position of the standard plane mirror is monitored, and the dispersion focusing range of a chromatic dispersion focusing element and the wavelength-position relation curve of the spectrum confocal line scanning device are calibrated; the standard plane mirror is replacedwith a sample for detection, and the surface of the sample is placed in a dispersion focusing range of the chromatic dispersion focusing element; an intensity point spread function of a return signalof a spectrograph is analyzed, a peak coordinate position is calculated by using a centroid method to obtain a return signal wavelength, and according to the wavelength-position relation curve, the maximum height difference of the surface of the sample is decoded, and the steps of the surface of the sample are rapidly calculated. The method has the beneficial effects that the structure is simple,the measurement speed is high, precision is high, the application range is wide, and the method is suitable for precise measurement of transparent or opaque steps, grooves, inclined surfaces and the like.
Description
technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a method for quickly measuring steps on the surface of an object by spectral confocal line scanning. Background technique [0002] Confocal Microscopy (Confocal Microscopy) is the most typical method to achieve optical tomography. The earliest confocal microscopy imaging device was proposed in 1961 by M. Invention patent right. Spectral confocal technology is developed on the basis of confocal microscope, a non-contact measurement method that combines the confocal principle of confocal microscopy technology and the principle of dispersion focusing. Compared with confocal microscopy technology, spectral confocal technology does not require an axial scanning device, which improves the measurement efficiency of ordinary confocal microscopes. At present, spectral confocal technology has had a wide impact in modern biology and medicine, physics, chemistry, ...
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IPC IPC(8): G01B11/03G01B11/06G01N21/84
Inventor 刘涛田博刘康杨树明李国卿刘强何韬王佳怡
Owner XI AN JIAOTONG UNIV